Meléndez-Campos Javier, Vázquez-Piñón Matias, Camacho-Leon Sergio
Tecnologico de Monterrey, School of Engineering and Sciences, Ave. Eugenio Garza Sada 2501, Monterrey 64849, Mexico.
Micromachines (Basel). 2021 Sep 2;12(9):1068. doi: 10.3390/mi12091068.
Dielectric characteristics are useful to determine crucial properties of liquids and to differentiate between liquid samples with similar physical characteristics. Liquid recognition has found applications in a broad variety of fields, including healthcare, food science, and quality inspection, among others. This work demonstrates the fabrication, instrumentation, and functionality of a portable wireless sensor node for the permittivity measurement of liquids that require characterization and differentiation. The node incorporates an interdigitated microelectrode array as a transducer and a microcontroller unit with radio communication electronics for data processing and transmission, which enable a wide variety of stand-alone applications. A laser-ablation-based microfabrication technique is applied to fabricate the microelectromechanical systems (MEMS) transducer on a printed circuit board (PCB) substrate. The surface of the transducer is covered with a thin layer of SU-8 polymer by spin coating, which prevents it from direct contact with the Cu electrodes and the liquid sample. This helps to enhance durability, avoid electrode corrosion and contamination of the liquid sample, and to prevent undesirable electrochemical reactions to arise. The transducer's impedance was modeled as a Randles cell, having resistive and reactive components determined analytically using a square wave as stimuli, and a resistor as a current-to-voltage converter. To characterize the node sensitivity under different conditions, three different transducer designs were fabricated and tested for four different fluids, i.e., air, isopropanol, glycerin, and distilled water-achieving a sensitivity of 1.6965 +/- 0.2028 ε/pF. The use of laser ablation allowed the reduction of the transducer footprint while maintaining its sensitivity within an adequate value for the targeted applications.
介电特性有助于确定液体的关键性质,并区分具有相似物理特性的液体样本。液体识别已在包括医疗保健、食品科学和质量检测等在内的广泛领域得到应用。这项工作展示了一种用于液体介电常数测量的便携式无线传感器节点的制造、仪器配置和功能,这些液体需要进行表征和区分。该节点包含一个叉指式微电极阵列作为传感器,以及一个带有用于数据处理和传输的无线电通信电子设备的微控制器单元,这使得能够实现各种各样的独立应用。一种基于激光烧蚀的微加工技术被应用于在印刷电路板(PCB)基板上制造微机电系统(MEMS)传感器。传感器表面通过旋涂覆盖有一层薄薄的SU-8聚合物,这可防止其与铜电极和液体样本直接接触。这有助于提高耐用性,避免电极腐蚀和液体样本污染,并防止产生不良的电化学反应。传感器的阻抗被建模为一个兰德尔等效电路,其电阻性和电抗性分量使用方波作为激励通过解析法确定,并且使用一个电阻器作为电流 - 电压转换器。为了表征该节点在不同条件下的灵敏度,制造了三种不同的传感器设计并针对四种不同的流体,即空气、异丙醇、甘油和蒸馏水进行了测试,实现了1.6965±0.2028 ε/pF的灵敏度。激光烧蚀的使用使得能够减小传感器的占地面积,同时将其灵敏度保持在针对目标应用的适当值范围内。