Zeng Yaxiang, Sanders Remco, Wiegerink Remco, Lötters Joost
Integrated Devices and Systems group, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
Bronkhorst High-Tech B.V., Nijverheidsstraat lA, 7261 AK Ruurlo, The Netherlands.
Micromachines (Basel). 2020 Mar 20;11(3):325. doi: 10.3390/mi11030325.
In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and outlet are etched through the handle layer and the interdigitated electrodes are made in the device layer. An impedance analyzer was used to measure the impedance between the interdigitated electrodes for various non-conducting fluids with a relative permittivity ranging from 1 to 41. The sensor shows good linearity over this range of relative permittivity and can be integrated with other microfluidic sensors in a multiparameter chip.
在本文中，我们展示了一种微流体相对介电常数传感器的设计、模拟、制造和特性，其中流体流经叉指电极结构。传感器制造基于绝缘体上硅（SOI）晶圆，流体入口和出口通过衬底层蚀刻而成，叉指电极在器件层中制作。使用阻抗分析仪测量叉指电极之间对于相对介电常数范围从1到41的各种非导电流体的阻抗。该传感器在这个相对介电常数范围内显示出良好的线性，并且可以与多参数芯片中的其他微流体传感器集成。
