Avila Pedro Renato Tavares, Apolinário Raíra Chefer, Rodrigues Alisson Mendes, Fernandes Jucielle Veras, Menezes Romualdo Rodrigues, Neves Gelmires de Araújo, Pinto Haroldo Cavalcanti
São Carlos School of Engineering (EESC), University of São Paulo, São Carlos 13563-120, SP, Brazil.
Laboratory of Materials Technology (LTM), Federal University of Campina Grande, Av. Aprígio Veloso-882, Bodocongó, Campina Grande 58429-900, PB, Brazil.
Nanomaterials (Basel). 2021 Aug 26;11(9):2187. doi: 10.3390/nano11092187.
The development of alternatives for wear protection in surface engineering can be responsible for a significant decrease in energy waste as a large amount of the energy produced in the world is lost due to tribological contact. Dynamic Glancing Angle Deposition has been recently evaluated as a route to produce coatings with improved wear performance. In this technique, the substrate oscillates along with a determined range in front of the sputtering target during the growth of the film. In this study, five oscillatory ranges (0, ±5°, ±10°, ±15°, ±20°) were probed to manufacture nanostructured Cr-Al-N coatings using direct current magnetron sputtering, and their impact was investigated on the grain morphology, phase formation, chemical composition, and performance of the coatings. FEG-SEM revealed the formation of multilayer-like architecture across the grains of the coatings. The deposition rate and hardness improved, and a more than 2-fold decrease in the material loss was observed in a comparison between the stationary-deposited conventional coating and the sample produced under ±10° oscillatory range. This indicated the potential use of this technique in future surface engineering applications.
表面工程中耐磨保护替代方案的发展可大幅减少能源浪费，因为世界上大量产生的能量因摩擦接触而损失。动态掠角沉积最近被评估为一种生产具有改善耐磨性能涂层的途径。在该技术中，在薄膜生长过程中，基材在溅射靶前沿确定范围振荡。在本研究中，使用直流磁控溅射探测了五个振荡范围（0、±5°、±10°、±15°、±20°）来制造纳米结构的Cr-Al-N涂层，并研究了它们对涂层的晶粒形态、相形成、化学成分和性能的影响。场发射扫描电子显微镜揭示了涂层晶粒间形成了类似多层的结构。与静止沉积的传统涂层相比，在±10°振荡范围下制备的样品沉积速率和硬度提高，材料损失减少了两倍多。这表明该技术在未来表面工程应用中的潜在用途。
