Cao Yinghua, Xu Zhi, You Linjing, Wu Yaxuan, Huang Hu
Key Laboratory of CNC Equipment Reliability, Ministry of Education, School of Mechanical and Aerospace Engineering,Jilin University, Changchun, Jilin 130022, China.
Rev Sci Instrum. 2021 Sep 1;92(9):099901. doi: 10.1063/5.0070310.