Hallum Goran Erik, Kürschner Dorian, Redka David, Niethammer Dorothée, Schulz Wolfgang, Huber Heinz Paul
Opt Express. 2021 Sep 13;29(19):30062-30076. doi: 10.1364/OE.434515.
The interaction of ultrashort laser pulses above the ablation threshold of thin-film indium tin oxide (ITO) is examined with pump-probe microscopy. We are able to observe photomechanical spallation at delay times of hundreds of picoseconds, which plays a stronger role near the ablation threshold of 0.17 J/cm. A phase explosion may also be observed at tens of picoseconds, playing a stronger role for increasing peak fluences. As one exceeds the material removal efficiency maximum near 0.6 J/cm, a second spallation is observable in the center of the irradiated spot at a delay time of one nanosecond and corresponds to a crater depth of 50 nanometers. No discernable ridge formation has been observed. We recommend an industrial processing window of at least two pulses per position with a peak fluence between 0.6-1.0 J/cm.
采用泵浦-探测显微镜研究了超短激光脉冲与薄膜铟锡氧化物（ITO）在烧蚀阈值以上的相互作用。我们能够在数百皮秒的延迟时间观察到光机械剥落现象，在0.17 J/cm的烧蚀阈值附近，这种现象起的作用更强。在几十皮秒时也可能观察到相爆炸，对于增加峰值通量，相爆炸起的作用更强。当超过0.6 J/cm附近的材料去除效率最大值时，在辐照光斑中心延迟1纳秒时可观察到第二次剥落，对应的坑深为50纳米。未观察到明显的脊形成。我们建议每个位置至少使用两个脉冲的工业加工窗口，峰值通量在0.6 - 1.0 J/cm之间。
