Lee Siyoung, Lee Eun Kwang, Lee Eunho, Bae Geun Yeol
Department of Chemical Engineering, Pohang University of Science and Technology, Pohang 37673, Korea.
MLCC Development Team, Samsung Electro-Mechanics, Suwon 16229, Korea.
Micromachines (Basel). 2021 Oct 14;12(10):1246. doi: 10.3390/mi12101246.
With the advent of human-machine interaction and the Internet of Things, wearable and flexible vibration sensors have been developed to detect human voices and surrounding vibrations transmitted to humans. However, previous wearable vibration sensors have limitations in the sensing performance, such as frequency response, linearity of sensitivity, and esthetics. In this study, a transparent and flexible vibration sensor was developed by incorporating organic/inorganic hybrid materials into ultrathin membranes. The sensor exhibited a linear and high sensitivity (20 mV/g) and a flat frequency response (80-3000 Hz), which are attributed to the wheel-shaped capacitive diaphragm structure fabricated by exploiting the high processability and low stiffness of the organic material SU-8 and the high conductivity of the inorganic material ITO. The sensor also has sufficient esthetics as a wearable device because of the high transparency of SU-8 and ITO. In addition, the temperature of the post-annealing process after ITO sputtering was optimized for the high transparency and conductivity. The fabricated sensor showed significant potential for use in transparent healthcare devices to monitor the vibrations transmitted from hand-held vibration tools and in a skin-attachable vocal sensor.
随着人机交互和物联网的出现，可穿戴和柔性振动传感器已被开发出来，用于检测人类声音以及传递给人类的周围振动。然而，先前的可穿戴振动传感器在传感性能方面存在局限性，如频率响应、灵敏度线性度和美观性。在本研究中，通过将有机/无机混合材料掺入超薄膜中，开发出了一种透明且柔性的振动传感器。该传感器表现出线性且高灵敏度（20 mV/g）和平坦的频率响应（80 - 3000 Hz），这归因于通过利用有机材料SU - 8的高加工性和低刚度以及无机材料ITO的高导电性制造的轮状电容式隔膜结构。由于SU - 8和ITO的高透明度，该传感器作为可穿戴设备也具有足够的美观性。此外，对ITO溅射后的退火后处理温度进行了优化，以实现高透明度和导电性。所制造的传感器在用于监测手持振动工具传递的振动的透明医疗设备以及可附着在皮肤上的语音传感器方面显示出巨大潜力。
