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用于热导率测量的气溶胶喷射打印三ω传感器。

Aerosol jet printed 3 omega sensors for thermal conductivity measurement.

作者信息

Kempf Nicholas, Zhang Yanliang

机构信息

Department of Aerospace and Mechanical Engineering, University of Notre Dame, Notre Dame, Indiana 46556, USA.

出版信息

Rev Sci Instrum. 2021 Oct 1;92(10):105008. doi: 10.1063/5.0059699.

Abstract

The 3 omega (3ω) method is a trusted technique for measuring thermal conductivity-a fundamental material property of critical importance in a broad range of applications. However, traditional 3ω sensor processing requires some form of physical vapor deposition, such as metal evaporation or sputtering. These 3ω sensor deposition techniques limit the materials and sample sizes applicable to the 3ω method. This work demonstrates an aerosol jet printing method to directly print silver 3ω sensors that yield accurate temperature-dependent measurement up to 300 °C on materials with thermal conductivity ranging from 1 to 150 W/m K. The interrelationship between printed sensor geometry, sensor thermal stability, and applicability to the 3ω method is examined. Thermal conductivity measurement with 3ω sensors conventionally sintered at 300 °C agrees to independent laser flash measurement within 4% from room temperature to 150 °C. An unconventional rapid high-temperature sintering method is shown to produce sensors that agree within 3% of the laser flash measurements from room temperature to 300 °C. The rapid sintering profiles also reduced the sensor-substrate thermal boundary resistance of the printed sensors by as much as 88%. The direct printing of 3ω sensors creates opportunities for measurement of thermal transport properties in applications previously inapplicable to the 3ω method.

摘要

三ω(3ω)法是一种用于测量热导率的可靠技术——热导率是一种基本的材料属性,在广泛的应用中至关重要。然而,传统的3ω传感器处理需要某种形式的物理气相沉积,如金属蒸发或溅射。这些3ω传感器沉积技术限制了适用于3ω法的材料和样品尺寸。这项工作展示了一种气溶胶喷射印刷方法,可直接印刷银3ω传感器,该传感器能在热导率范围为1至150W/m·K的材料上,在高达300°C的温度下进行精确的温度相关测量。研究了印刷传感器几何形状、传感器热稳定性以及对3ω法适用性之间的相互关系。使用传统方法在300°C烧结的3ω传感器进行的热导率测量,在从室温到150°C的范围内与独立的激光闪光测量结果的误差在4%以内。结果表明,一种非常规的快速高温烧结方法所生产的传感器,在从室温到300°C的范围内与激光闪光测量结果的误差在3%以内。快速烧结曲线还使印刷传感器的传感器 - 衬底热边界电阻降低了多达88%。3ω传感器的直接印刷为在以前不适用于3ω法的应用中测量热传输特性创造了机会。

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