Beamline Group, SAGA Light Source, 8-7 Yayoigaoka, Tosu, Saga 841-0005, Japan.
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), Central 5, 1-1-1 Higashi, Tukuba, Ibaraki 305-8565, Japan.
J Synchrotron Radiat. 2021 Nov 1;28(Pt 6):1966-1977. doi: 10.1107/S1600577521009553. Epub 2021 Oct 21.
The SAGA Light Source provides X-ray imaging resources based on high-intensity synchrotron radiation (SR) emitted from the superconducting wiggler at beamline 07 (BL07). By combining quasi-monochromatic SR obtained by the newly installed water-cooled metal filter and monochromatic SR selected by a Ge double-crystal monochromator (DCM) with high-resolution lens-coupled X-ray imagers, fast and low-dose micro-computed tomography (CT), fast phase-contrast CT using grating-based X-ray interferometry, and 2D micro-X-ray absorption fine structure analysis can be performed. In addition, by combining monochromatic SR obtained by a Si DCM with large-area fiber-coupled X-ray imagers, high-sensitivity phase-contrast CT using crystal-based X-ray interferometry can be performed. Low-temperature CT can be performed using the newly installed cryogenic system, and time-resolved analysis of the crystallinity of semiconductor devices in operation can be performed using a time-resolved topography system. The details of each instrument and imaging method, together with exemplary measurements, are presented.
SAGA 光源提供了基于超导扭摆器在光束线 07（BL07）中发射的高强度同步辐射（SR）的 X 射线成像资源。通过将新安装的水冷金属滤波器获得的准单色 SR 与 Ge 双晶单色器（DCM）选择的单色 SR 相结合，结合高分辨率透镜耦合 X 射线成像仪，可进行快速、低剂量的微计算机断层扫描（CT）、基于光栅的 X 射线干涉术的快速相衬 CT 以及二维微 X 射线吸收精细结构分析。此外，通过将 Si DCM 获得的单色 SR 与大面积光纤耦合 X 射线成像仪相结合，可以进行基于晶体的 X 射线干涉术的高灵敏度相衬 CT。使用新安装的低温系统可以进行低温 CT，并且可以使用时间分辨形貌系统对运行中的半导体器件的结晶度进行时间分辨分析。介绍了每种仪器和成像方法的详细信息，以及示例测量。
