Ren Yingming, Zhang Zhiyu
Opt Express. 2021 Oct 11;29(21):33804-33817. doi: 10.1364/OE.434313.
Laser-induced microstructures have attracted significant research interest owing to their wide application potential for anti-reflective surfaces and optoelectronic devices. To elucidate the characteristics of laser-patterned microstructures, nanosecond-laser-induced micro-protrusions on amorphous silicon film surfaces were investigated via single-and multi-line irradiation experiments. For the former, the results reveal that the number of periodic micro-protrusions depends on the peak power intensity. In addition, the height and the base diameter of the micro-protrusions can be tailored by adjusting the peak power intensity and scanning distance of the laser, while increasing the peak power intensity also increases surface roughness. X-ray spectroscopy confirmed that the microstructures were mainly composed of silicon. The relationship between the formation mechanism and the size of the micro-protrusions is also discussed, with the results of this study providing valuable insights into the laser-induced microstructure formation.
由于激光诱导微结构在抗反射表面和光电器件方面具有广泛的应用潜力，因此引起了广泛的研究兴趣。为了阐明激光图案化微结构的特性，通过单线和多线辐照实验研究了非晶硅薄膜表面上纳秒激光诱导的微突起。对于单线辐照实验，结果表明周期性微突起的数量取决于峰值功率强度。此外，通过调节激光的峰值功率强度和扫描距离，可以调整微突起的高度和底部直径，同时增加峰值功率强度也会增加表面粗糙度。X射线光谱证实这些微结构主要由硅组成。还讨论了微突起的形成机制与尺寸之间的关系，本研究结果为激光诱导微结构的形成提供了有价值的见解。
