Aizen Amir, Abdulhalim Ibrahim
Opt Express. 2021 Oct 11;29(21):34278-34292. doi: 10.1364/OE.432764.
Current phase unwrapping methods for non-scanning interferometry systems with one wavelength are not robust in the presence of high steps while still having a limited step height and range using two wavelengths configurations. Here, a new phase unwrapping method is proposed, allowing imaging steps with a height up to 15 times the wavelength using one wavelength or up to 1500 times using two wavelengths. It is based on a one-time computational model fitting of calibration measurements that allows to extract the degree of coherence and phase from two phase-shifted images per wavelength, perform phase unwrapping and accurately reconstruct the 3D structure of the sample. The proposed method has a nanometric axial accuracy and can operate in real-time. The algorithms and methodology for one and two wavelengths are presented and confirmed experimentally.
当前用于单波长非扫描干涉测量系统的相位展开方法，在存在高台阶时不够稳健，而使用双波长配置时步高和范围仍有限。在此，提出了一种新的相位展开方法，该方法允许使用单波长成像高达波长15倍的台阶，或使用双波长成像高达波长1500倍的台阶。它基于校准测量的一次性计算模型拟合，该拟合允许从每个波长的两幅相移图像中提取相干度和相位，进行相位展开并准确重建样品的三维结构。所提出的方法具有纳米级轴向精度，并且可以实时运行。给出了单波长和双波长的算法及方法，并通过实验进行了验证。
