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用于自由形式微光学阵列的双光子灰度光刻技术。

Two-photon grayscale lithography for free-form micro-optical arrays.

作者信息

Aderneuer Tamara, Fernández Oscar, Ferrini Rolando

出版信息

Opt Express. 2021 Nov 22;29(24):39511-39520. doi: 10.1364/OE.440251.


DOI:10.1364/OE.440251
PMID:34809314
Abstract

Compared to standard rotationally symmetric macroscopic optical components, free-form micro-optical arrays (FMOAs), sometimes termed microstructured optical surfaces, offer greater design freedom and a smaller footprint. Hence, they are used in optical devices to deliver new functionalities, enhanced device performance, and/or a greater degree of miniaturization. But their more complex surface shape is a challenge for traditional manufacturing technologies, and this has triggered a substantial effort by research institutes and industry to develop alternative fabrication solutions. Two-photon polymerization (2PP) is a promising additive manufacturing technology to manufacture 3D optical (micro)structures. The manufacturing times involved are, however, often impractically long, especially for the excellent surface quality required for optical applications. Recently, Nanoscribe GmbH has reduced manufacturing times substantially with the introduction of so-called two-photon grayscale lithography (2GL). However, its acceleration potential and consequent impact on surface quality have, to the best of our knowledge, yet to be reported. A direct comparison between 2PP and 2GL indicates that, for the investigated FMOA, 2GL is around five times faster than 2PP and also delivers better surface quality. This study therefore confirms the potential of 2GL to manufacture complexly shaped FMOAs.

摘要

与标准的旋转对称宏观光学元件相比,自由形式微光学阵列(FMOA),有时也称为微结构光学表面,具有更大的设计自由度和更小的占地面积。因此,它们被用于光学设备中,以实现新功能、提高设备性能和/或实现更高程度的小型化。但是,它们更为复杂的表面形状对传统制造技术构成了挑战,这促使研究机构和行业付出巨大努力来开发替代制造解决方案。双光子聚合(2PP)是一种用于制造3D光学(微)结构的有前景的增材制造技术。然而,所涉及的制造时间通常长得不切实际,特别是对于光学应用所需的优异表面质量而言。最近,Nanoscribe GmbH通过引入所谓的双光子灰度光刻(2GL),大幅缩短了制造时间。然而,据我们所知,其加速潜力以及对表面质量的后续影响尚未见报道。2PP和2GL之间的直接比较表明,对于所研究的FMOA,2GL比2PP快约五倍,并且表面质量也更好。因此,本研究证实了2GL制造形状复杂的FMOA的潜力。

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