用于深微通道的梯形横截面微阀
Microvalve with Trapezoid-Shaped Cross-Section for Deep Microchannels.
作者信息
Kaminaga Maho, Ishida Tadashi, Omata Toru
机构信息
Department of Mechanical Engineering, National Institute of Technology, Toyota College, 2-1 Eiseicho, Toyota 471-0067, Japan.
Department of Mechanical Engineering, School of Engineering, Tokyo Institute of Technology, 12-1 Ookayama, Tokyo 152-8550, Japan.
出版信息
Micromachines (Basel). 2021 Nov 15;12(11):1403. doi: 10.3390/mi12111403.
Simple microfluidic systems for handling large particles such as three-dimensional (3D) cultured cells, microcapsules, and animalcules have contributed to the advancement of biology. However, obtaining a highly integrated microfluidic device for handling large particles is difficult because there are no suitable microvalves for deep microchannels. Therefore, this study proposes a microvalve with a trapezoid-shaped cross-section to close a deep microchannel. The proposed microvalve can close a 350 μm deep microchannel, which is suitable for handling hundreds of micrometer-scale particles. A double-inclined lithography process was used to fabricate the trapezoid-shaped cross-section. The microvalve was fabricated by bonding three polydimethylsiloxane layers: a trapezoid-shaped liquid channel layer, a membrane, and a pneumatic channel layer. The pneumatic balloon, consisting of the membrane and the pneumatic channel, was located beneath a trapezoid-shaped cross-section microchannel. The valve was operated by the application of pneumatic pressure to the pneumatic channel. We experimentally confirmed that the expansion of the pneumatic balloon could close the 350 μm deep microchannel.
用于处理诸如三维（3D）培养细胞、微胶囊和微生物等大颗粒的简单微流控系统推动了生物学的发展。然而，由于没有适用于深微通道的微阀，获得用于处理大颗粒的高度集成微流控装置很困难。因此，本研究提出了一种具有梯形横截面的微阀来关闭深微通道。所提出的微阀可以关闭350μm深的微通道，这适用于处理数百微米尺度的颗粒。采用双倾斜光刻工艺制造梯形横截面。微阀通过将三个聚二甲基硅氧烷层粘合在一起制成：一个梯形液体通道层、一个膜和一个气动通道层。由膜和气动脉冲组成的气囊位于梯形横截面微通道下方。通过向气动通道施加气压来操作阀门。我们通过实验证实，气囊的膨胀可以关闭350μm深的微通道。
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