van der Geest M L S, Sadegh N, Meerwijk T M, Wooning E I, Wu L, Bloem R, Castellanos Ortega S, Brouwer A M, Kraus P M
Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands.
Rev Sci Instrum. 2021 Nov 1;92(11):113004. doi: 10.1063/5.0064780.
We present a table-top extreme ultraviolet (XUV) beamline for measuring time- and frequency-resolved XUV-excited optical luminescence (XEOL) with additional femtosecond-resolution XUV transient absorption spectroscopy functionality. XUV pulses are generated via high-harmonic generation using a near-infrared pulse in a noble gas medium and focused to excite luminescence from a solid sample. The luminescence is collimated and guided into a streak camera where its spectral components are temporally resolved with picosecond temporal resolution. We time-resolve XUV-excited luminescence and compare the results to luminescence decays excited at longer wavelengths for three different materials: (i) sodium salicylate, an often used XUV scintillator; (ii) fluorescent labeling molecule 4-carbazole benzoic (CB) acid; and (iii) a zirconium metal oxo-cluster labeled with CB, which is a photoresist candidate for extreme-ultraviolet lithography. Our results establish time-resolved XEOL as a new technique to measure transient XUV-driven phenomena in solid-state samples and identify decay mechanisms of molecules following XUV and soft-x-ray excitation.
我们展示了一种桌面型极紫外(XUV)光束线,用于测量时间分辨和频率分辨的XUV激发光致发光(XEOL),并具备额外的飞秒分辨率XUV瞬态吸收光谱功能。XUV脉冲通过在惰性气体介质中使用近红外脉冲进行高次谐波产生而生成,并聚焦以激发固体样品的发光。发光被准直并导入条纹相机,在其中其光谱成分以皮秒时间分辨率进行时间分辨。我们对XUV激发的发光进行时间分辨,并将结果与三种不同材料在较长波长激发的发光衰减进行比较:(i)水杨酸钠,一种常用的XUV闪烁体;(ii)荧光标记分子4-咔唑苯甲酸(CB);以及(iii)一种用CB标记的锆金属氧簇,它是极紫外光刻的光刻胶候选材料。我们的结果确立了时间分辨XEOL作为一种测量固态样品中瞬态XUV驱动现象并识别分子在XUV和软X射线激发后的衰减机制的新技术。