Vijayan Sriram, Wang Rongxuan, Kong Zhenyu, Jinschek Joerg R
Department of Materials Science & Engineering, The Ohio State University, Columbus, Ohio, USA.
Grado Department of Industrial and Systems Engineering, Virginia Tech, Blacksburg, Virginia, USA.
Microsc Res Tech. 2022 Apr;85(4):1527-1537. doi: 10.1002/jemt.24015. Epub 2021 Dec 13.
Studies on materials affected by large thermal gradients and rapid thermal cycling are an area of increasing interest, driving the need for real time observations of microstructural evoultion under transient thermal conditions. However, current in situ transmission electron microscope (TEM) heating stages introduce uniform temperature distributions across the material during heating experiments. Here, a methodology is described to generate thermal gradients across a TEM specimen by modifying a commercially available MEMS-based heating stage. It was found that a specimen placed next to the metallic heater, over a window, cut by FIB milling, does not disrupt the overall thermal stability of the device. Infrared thermal imaging (IRTI) experiments were performed on unmodified and modified heating devices, to measure thermal gradients across the device. The mean temperature measured within the central viewing area of the unmodified device was 3-5% lower than the setpoint temperature. Using IRTI data, at setpoint temperatures ranging from 900 to 1,300°C, thermal gradients at the edge of the modified window were calculated to be in the range of 0.6 × 10 to 7.0 × 10 °C/m. Additionally, the Ag nanocube sublimation approach was used, to measure the local temperature across a FIB-cut Si lamella at high spatial resolution inside the TEM, and demonstrate "proof of concept" of the modified MEMS device. The thermal gradient across the Si lamella, measured using the latter approach was found to be 6.3 × 10 °C/m, at a setpoint temperature of 1,000°C. Finally, the applicability of this approach and choice of experimental parameters are critically discussed.
对受大温度梯度和快速热循环影响的材料进行研究是一个日益受到关注的领域,这推动了在瞬态热条件下对微观结构演变进行实时观测的需求。然而,当前的原位透射电子显微镜(TEM)加热台在加热实验过程中会使材料上的温度分布均匀。在此,描述了一种通过改进市售的基于微机电系统(MEMS)的加热台在TEM样品上产生温度梯度的方法。结果发现,放置在金属加热器旁边、通过聚焦离子束(FIB)铣削切割出的窗口上方的样品,不会破坏设备的整体热稳定性。对未改进和改进后的加热设备进行了红外热成像(IRTI)实验,以测量设备上的温度梯度。未改进设备中心观察区域内测得的平均温度比设定温度低3 - 5%。利用IRTI数据,在900至1300°C的设定温度范围内,计算出改进窗口边缘的温度梯度在0.6×10至7.0×10°C/m范围内。此外,采用银纳米立方体升华方法,在TEM内部以高空间分辨率测量FIB切割的硅薄片上的局部温度,并证明了改进后的MEMS设备的“概念验证”。在1000°C的设定温度下,使用后一种方法测得的硅薄片上的温度梯度为6.3×10°C/m。最后,对该方法的适用性和实验参数的选择进行了严格讨论。