Wang Yuezong, Chen Jiqiang, Peng Youfan
Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing100124, China.
Microsc Microanal. 2022 Feb;28(1):152-172. doi: 10.1017/S1431927621013829.
A structured-light projection system was designed for microscale objects with surface heights that ranged from tens to hundreds of microns. The system was composed of a universal projector and microscope system that supported editing the attributes of structured-light patterns in real-time and was capable of projecting microscale patterns. On this basis, reconstructing the metal surfaces of microscale objects based on grid patterns of structured light was investigated, the internal and external parameters of microscope vision and projection systems were calibrated, and an image algorithm for grid-node detection was designed. The results indicated that the proposed method successfully reconstructed the three-dimensional (3D) surface of microscale objects, and the reconstruction results were consistent with the original surfaces. With 95% confidence, the reconstruction precision in the X- and Y-directions was approximately ±4.0 μm and in the Z-direction was approximately ±7.5 μm. The designed system and the proposed method were suitable for 3D-shape measurement of microstructures in microscopic fields and can be adapted to meet a broader range of applications, as compared to current methods.
设计了一种用于表面高度在几十到几百微米范围内的微观物体的结构光投影系统。该系统由一个通用投影仪和显微镜系统组成，支持实时编辑结构光图案的属性，并能够投影微观图案。在此基础上，研究了基于结构光网格图案重建微观物体的金属表面，校准了显微镜视觉和投影系统的内外部参数，并设计了一种用于网格节点检测的图像算法。结果表明，该方法成功地重建了微观物体的三维（3D）表面，重建结果与原始表面一致。在95%的置信度下，X和Y方向的重建精度约为±4.0μm，Z方向的重建精度约为±7.5μm。与现有方法相比，所设计的系统和提出的方法适用于微观领域中微观结构的三维形状测量，并且可以适应更广泛的应用。
