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恒定应变下铜纳米柱中纳米孪晶取向对历史依赖性应力衰减的影响

Nanotwin orientation on history-dependent stress decay in Cu nanopillar under constant strain.

作者信息

Shen Yu-An, Chang Li, Chang Shou-Yi, Chou Y-C, Tu K N, Chen Chih

机构信息

Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu, Taiwan 30010, Republic of China.

Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan 30010, Republic of China.

出版信息

Nanotechnology. 2022 Jan 21;33(15). doi: 10.1088/1361-6528/ac46d9.

DOI:10.1088/1361-6528/ac46d9
PMID:34965523
Abstract

Cu with nanotwin (NT) possesses great electrical, mechanical, and thermal properties and has potential for electronic applications. Various studies have reported the effect of NT orientation on Cu mechanical properties. However, its effect on Cu stress-relaxation behavior has not been clarified, particularly in nano-scale. In this study, Cu nanopillars with various orientations were examined by a picoindenter under constant strain and observed byTEM. The angles between the twin plane and the loading direction in the examined nanopillars were 0°, 60°, to 90°, and a benchmark pillar of single-crystal Cu without NT was examined. The stress drops were respectively 10%, 80%, 4%, and 50%. Owing to the interaction by NT, the dislocation behavior in nanopillars was different from that in bulk or in thin film samples. Especially, the rapid slip path of dislocations to go to the free surface of the nanopillar induced a dislocation-free zone in the 0° nanopillar, which led to work-softening. On the contrary, a high dislocation density was observed in the 90° nanopillar, which was generated by dislocation interaction and obstruction of dislocation slip by twin planes, and it led to work-hardening. The findings reveal the NT orientation in Cu nanopillars affected stress relaxation significantly.

摘要

具有纳米孪晶(NT)的铜具有优异的电学、力学和热学性能,在电子应用方面具有潜力。各种研究报道了纳米孪晶取向对铜力学性能的影响。然而,其对铜应力松弛行为的影响尚未明确,尤其是在纳米尺度上。在本研究中,通过皮氏压痕仪在恒定应变下对不同取向的铜纳米柱进行了检测,并通过透射电子显微镜(TEM)进行了观察。所检测的纳米柱中孪晶面与加载方向之间的夹角为0°、60°至90°,并对无纳米孪晶的单晶铜基准柱进行了检测。应力下降分别为10%、80%、4%和50%。由于纳米孪晶的相互作用,纳米柱中的位错行为与块状或薄膜样品中的不同。特别是,位错向纳米柱自由表面的快速滑移路径在0°纳米柱中形成了一个无位错区,导致了加工软化。相反,在90°纳米柱中观察到高位错密度,这是由位错相互作用和孪晶面对位错滑移的阻碍产生的,导致了加工硬化。研究结果表明,铜纳米柱中的纳米孪晶取向对应力松弛有显著影响。

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