Zhao Yunbiao, Wang Tiantong, Zhao Ziqiang, Wang Qining
Department of Advanced Manufacturing and Robotics, College of Engineering, Peking University, Beijing 100871, China.
State Key Laboratory of Nuclear Physics and Technology, School of Physics, Peking University, Beijing 100871, China.
ACS Appl Mater Interfaces. 2022 Jan 12;14(1):1791-1799. doi: 10.1021/acsami.1c21648. Epub 2021 Dec 30.
Flexible pressure sensors with high sensitivity are highly desired in wearable electronics and human-machine interaction. Introducing the surface microstructures to the capacitive-type sensors can improve sensitivity and reduce response time. However, conventional techniques for the fabrication of highly sensitive and large-area pressure sensors still remain challenging. Here, a template synthesis approach is reported for fabrication of a large-area and low-cost ionic micropillar array templated from track-etch membranes. The pressure sensors based on the ionic micropillars gel dielectric layers exhibit a low limit of detection (∼0.5 Pa) and high sensitivity (14.83 kPa) in the low-pressure regime (0-5 kPa) and linear sensitivity (1.96 kPa) over a wide pressure range of 24-230 kPa. The versatility of the sensors is demonstrated in various human physiological signal detection scenarios and spatial pressure distribution. Furthermore, a real-time pressure mapping insole was fabricated on the basis of a large-area micropillared ionic gel dielectric layer combined with the screen-printing technique. The scalable and low-cost fabrication of pressure sensors with micropillars templated from a track-etch membrane provides new insights into the future development of health monitoring and human-machine interaction.
在可穿戴电子设备和人机交互领域，人们迫切需要高灵敏度的柔性压力传感器。在电容式传感器中引入表面微结构可以提高灵敏度并缩短响应时间。然而，制造高灵敏度大面积压力传感器的传统技术仍然具有挑战性。在此，报道了一种模板合成方法，用于制造以径迹蚀刻膜为模板的大面积低成本离子微柱阵列。基于离子微柱凝胶介电层的压力传感器在低压范围（0 - 5 kPa）内表现出低检测限（约0.5 Pa）和高灵敏度（14.83 kPa），在24 - 230 kPa的宽压力范围内具有线性灵敏度（1.96 kPa）。该传感器的多功能性在各种人体生理信号检测场景和空间压力分布中得到了证明。此外，基于大面积微柱离子凝胶介电层结合丝网印刷技术制造了实时压力映射鞋垫。以径迹蚀刻膜为模板的微柱压力传感器的可扩展且低成本制造为健康监测和人机交互的未来发展提供了新的见解。
