Qin Ruzhan, Hu Mingjun, Li Xin, Liang Te, Tan Haoyi, Liu Jinzhang, Shan Guangcun
School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing, 100191 China.
School of Materials Science and Engineering, Beihang University, Beijing, 100191 China.
Microsyst Nanoeng. 2021 Nov 30;7:100. doi: 10.1038/s41378-021-00327-1. eCollection 2021.
The development of flexible capacitive pressure sensors has wide application prospects in the fields of electronic skin and intelligent wearable electronic devices, but it is still a great challenge to fabricate capacitive sensors with high sensitivity. Few reports have considered the use of interdigital electrode structures to improve the sensitivity of capacitive pressure sensors. In this work, a new strategy for the fabrication of a high-performance capacitive flexible pressure sensor based on MXene/polyvinylpyrrolidone (PVP) by an interdigital electrode is reported. By increasing the number of interdigital electrodes and selecting the appropriate dielectric layer, the sensitivity of the capacitive sensor can be improved. The capacitive sensor based on MXene/PVP here has a high sensitivity (1.25 kPa), low detection limit (0.6 Pa), wide sensing range (up to 294 kPa), fast response and recovery times (~30/15 ms) and mechanical stability of 10000 cycles. The presented sensor here can be used for various pressure detection applications, such as finger pressing, wrist pulse measuring, breathing, swallowing and speech recognition. This work provides a new method of using interdigital electrodes to fabricate a highly sensitive capacitive sensor with very promising application prospects in flexible sensors and wearable electronics.
柔性电容式压力传感器的发展在电子皮肤和智能可穿戴电子设备领域具有广阔的应用前景,但制造高灵敏度的电容式传感器仍然是一个巨大的挑战。很少有报告考虑使用叉指电极结构来提高电容式压力传感器的灵敏度。在这项工作中,报道了一种基于叉指电极通过MXene/聚乙烯吡咯烷酮(PVP)制造高性能电容式柔性压力传感器的新策略。通过增加叉指电极的数量并选择合适的介电层,可以提高电容式传感器的灵敏度。这里基于MXene/PVP的电容式传感器具有高灵敏度(约1.25 kPa)、低检测限(约0.6 Pa)、宽传感范围(高达294 kPa)、快速响应和恢复时间(约30/15 ms)以及10000次循环的机械稳定性。这里展示的传感器可用于各种压力检测应用,如手指按压、手腕脉搏测量、呼吸、吞咽和语音识别。这项工作提供了一种使用叉指电极制造高灵敏度电容式传感器的新方法,在柔性传感器和可穿戴电子设备中具有非常广阔的应用前景。