Yamaguchi Gota, Motoyama Hiroto, Owada Shigeki, Kubota Yuya, Egawa Satoru, Kume Takehiro, Takeo Yoko, Yabashi Makina, Mimura Hidekazu
Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan.
Department of Chemistry, School of Science, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan.
Rev Sci Instrum. 2021 Dec 1;92(12):123106. doi: 10.1063/5.0065684.
We developed a copper electroforming replication (CER) process to fabricate precise ellipsoidal mirrors for soft x-ray focusing. Some applications of ellipsoidal mirrors in x-ray microscopy require that all components that are close to samples, including the mirrors, are made of non-magnetic materials. In this study, a non-magnetic copper ellipsoidal mirror was fabricated by replicating a figured and super-polished quartz glass mandrel using an electroforming technique. It was found that the CER process has a high replication accuracy of 8 nm. The focusing performance of the mirror was characterized using a soft x-ray free-electron laser with a photon energy of 100 eV. A small focus size of 370 × 400 nm was achieved with a high reflectivity of 65%.
我们开发了一种铜电铸复制（CER）工艺，用于制造用于软X射线聚焦的精密椭球面镜。椭球面镜在X射线显微镜中的一些应用要求所有靠近样品的部件，包括镜子，都由非磁性材料制成。在本研究中，通过使用电铸技术复制一个经过成型和超抛光的石英玻璃芯轴，制造了一个非磁性铜椭球面镜。结果发现，CER工艺具有8nm的高复制精度。使用光子能量为100eV的软X射线自由电子激光对镜子的聚焦性能进行了表征。实现了370×400nm的小焦点尺寸，反射率高达65%。
