Yi Jian, Zhou Hao, Wei Wei-Hua, Han Xing-Chen, Han Dong-Dong, Gao Bing-Rong
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China.
Front Chem. 2021 Dec 16;9:823715. doi: 10.3389/fchem.2021.823715. eCollection 2021.
Due to unique optical and electrical properties, micro-/nano-structures have become an essential part of optoelectronic devices. Here, we summarize the recent developments in micro-/nano-structures fabricated by laser technologies for optoelectronic devices. The fabrication of micro-/nano-structures by various laser technologies is reviewed. Micro-/nano-structures in optoelectronic devices for performance improvement are reviewed. In addition, typical optoelectronic devices with micro-nano structures are also summarized. Finally, the challenges and prospects are discussed.
由于具有独特的光学和电学性质，微/纳米结构已成为光电器件的重要组成部分。在此，我们总结了利用激光技术制造用于光电器件的微/纳米结构的最新进展。综述了通过各种激光技术制造微/纳米结构的情况。综述了用于提高性能的光电器件中的微/纳米结构。此外，还总结了具有微纳米结构的典型光电器件。最后，讨论了面临的挑战和前景。
