Li Zhen, Qiu Lirong, Hu Lu, Lu Liping, Zhu Desheng, Chen Hanqiao, Huang Wencai, Wang Xiulin
Appl Opt. 2022 Jan 10;61(2):540-545. doi: 10.1364/AO.442356.
A novel method called even-power phase modulation is proposed in a self-mixing displacement sensor to improve measuring accuracy, to the best of our knowledge, which is realized by combining the even-power fast algorithm with the sinusoidal phase-modulation method. By performing the even-power fast algorithm in the self-mixing interference system, the spectrum of harmonic components is broadened. In this case, the extracted first and second harmonic components in the frequency domain contain rich information, and the displacement of the target can be accurately reconstructed. The principle and signal processing approach are introduced in detail, and the simulation results show that the reconstruction error can be effectively reduced compared with the electro-optic modulator phase modulation method. A series of experiments at different vibration amplitudes is conducted to confirm the feasibility and effectiveness of the method. An amplitude of 120 nm is proved to be measurable, and the absolute error is 10 nm, which shows great potential in the field of non-contact nanometer vibration measurement sensors.
据我们所知，一种名为偶次幂相位调制的新方法被应用于自混合位移传感器中以提高测量精度，该方法通过将偶次幂快速算法与正弦相位调制方法相结合来实现。通过在自混合干涉系统中执行偶次幂快速算法，谐波分量的频谱得以拓宽。在这种情况下，频域中提取的一次和二次谐波分量包含丰富信息，并且可以精确重建目标的位移。详细介绍了原理和信号处理方法，仿真结果表明，与电光调制器相位调制方法相比，该方法能有效降低重建误差。进行了一系列不同振动幅度的实验以证实该方法的可行性和有效性。实验证明可测量的振幅为120纳米，绝对误差为10纳米，这表明该方法在非接触纳米振动测量传感器领域具有巨大潜力。
