Design and Preparation of Self-Oscillating Actuators Using Piezoelectric Ceramics with High Coupling Factors and Mechanical Quality Factors.

Piezoelectric material properties were optimized to develop materials for an ultrasonic vibrator targeting a high vibration efficiency. Herein, novel materials were developed using a composition represented by 0.08Pb(NiNb)O-0.07Pb(MnNb)O-0.85Pb(ZrTi)O + 0.3 wt.% CuO + 0.3 wt.% FeO with 0.3 wt.% SbO doping. A ceramic shape with a thickness of 2 mm was optimized using finite element analysis software, and high values of coupling factors (0.54) and mechanical quality factors (1151) were obtained. This ceramic was used to fabricate a bio-beauty device (frequency = 1 MHz), and the manufactured ultrasonic vibrator indicated that the actuator oscillated with the maximum amplitude at a frequency of 1.06 MHz.