• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

用于锡激光产生等离子体的能量和电荷态分辨光谱分析的静电和飞行时间组合分析仪的交叉校准

Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy- and charge-state-resolved spectrometry of tin laser-produced plasma.

作者信息

Poirier L, Bayerle A, Lassise A, Torretti F, Schupp R, Behnke L, Mostafa Y, Ubachs W, Versolato O O, Hoekstra R

机构信息

Advanced Research Center for Nanolithography (ARCNL), Science Park 106, 1098 XG Amsterdam, The Netherlands.

Department of Physics and Astronomy and LaserLab, Vrije Universiteit Amsterdam, De Boelelaan 1081, 1081 HV Amsterdam, The Netherlands.

出版信息

Appl Phys B. 2022;128(3):39. doi: 10.1007/s00340-022-07767-1. Epub 2022 Feb 5.

DOI:10.1007/s00340-022-07767-1
PMID:35221544
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8818011/
Abstract

We present the results of the calibration of a channeltron-based electrostatic analyzer operating in time-of-flight mode (ESA-ToF) using tin ions resulting from laser-produced plasma, over a wide range of charge states and energies. Specifically, the channeltron electron multiplier detection efficiency and the spectrometer resolution are calibrated, and count rate effects are characterized. With the obtained overall response function, the ESA-ToF is shown to accurately reproduce charge-integrated measurements separately and simultaneously obtained from a Faraday cup (FC), up to a constant factor the finding of which enables absolute cross-calibration of the ESA-ToF using the FC as an absolute benchmark. Absolute charge-state-resolved ion energy distributions are obtained from ns-pulse Nd:YAG-laser-produced microdroplet tin plasmas in a setting relevant for state-of-the-art extreme ultraviolet nanolithography.

摘要

我们展示了基于通道电子倍增器的静电分析仪在飞行时间模式（ESA-ToF）下的校准结果，该校准使用了激光产生的等离子体中的锡离子，涵盖了广泛的电荷态和能量范围。具体而言，对通道电子倍增器的探测效率和光谱仪分辨率进行了校准，并对计数率效应进行了表征。利用获得的整体响应函数，ESA-ToF能够准确地分别重现以及同时重现从法拉第杯（FC）单独获得的电荷积分测量结果，直至一个常数因子，该常数因子的发现使得能够使用FC作为绝对基准对ESA-ToF进行绝对交叉校准。在与最先进的极紫外纳米光刻相关的环境中，从纳秒脉冲Nd:YAG激光产生的微滴锡等离子体中获得了绝对电荷态分辨的离子能量分布。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/2ec79dd47b03/340_2022_7767_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/da0d616f0570/340_2022_7767_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/7282385f735f/340_2022_7767_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/26716c613df2/340_2022_7767_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/fd2a6c911906/340_2022_7767_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/f0bc73a7e18a/340_2022_7767_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/7f87229d3060/340_2022_7767_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/303939c60815/340_2022_7767_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/28d88e1f56d8/340_2022_7767_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/2ec79dd47b03/340_2022_7767_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/da0d616f0570/340_2022_7767_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/7282385f735f/340_2022_7767_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/26716c613df2/340_2022_7767_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/fd2a6c911906/340_2022_7767_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/f0bc73a7e18a/340_2022_7767_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/7f87229d3060/340_2022_7767_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/303939c60815/340_2022_7767_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/28d88e1f56d8/340_2022_7767_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08e/8818011/2ec79dd47b03/340_2022_7767_Fig9_HTML.jpg

相似文献

1
Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy- and charge-state-resolved spectrometry of tin laser-produced plasma.用于锡激光产生等离子体的能量和电荷态分辨光谱分析的静电和飞行时间组合分析仪的交叉校准
Appl Phys B. 2022;128(3):39. doi: 10.1007/s00340-022-07767-1. Epub 2022 Feb 5.
2
Optimization of laser-target parameters for the production of stable lithium beam.
Rev Sci Instrum. 2020 Mar 1;91(3):033317. doi: 10.1063/1.5128547.
3
The study towards high intensity high charge state laser ion sources.
Rev Sci Instrum. 2014 Feb;85(2):02B910. doi: 10.1063/1.4833921.
4
Multicharged carbon ion generation from laser plasma.激光等离子体产生的多电荷碳离子
Rev Sci Instrum. 2016 Nov;87(11):113304. doi: 10.1063/1.4966987.
5
Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources.用于未来纳米光刻设备和X射线源的泡沫靶激光产生等离子体的动力学。
Sci Rep. 2021 Jul 1;11(1):13677. doi: 10.1038/s41598-021-93193-w.
6
Iron plasma generation using a Nd:YAG laser pulse of several hundred picoseconds.
Rev Sci Instrum. 2016 Feb;87(2):02A919. doi: 10.1063/1.4938258.
7
Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma.
Phys Rev E. 2020 Jul;102(1-1):013204. doi: 10.1103/PhysRevE.102.013204.
8
The bipolar charge plasma spectrometer (BCPS) based on the 2π-field-of-view double-channel electrostatic analyzer.
Rev Sci Instrum. 2022 Apr 1;93(4):043305. doi: 10.1063/5.0082410.
9
Design and calibration of an electrostatic energy analyzer-time-of-flight mass spectrometer for measurement of laser-desorbed ion kinetic energies.用于测量激光解吸离子动能的静电能量分析器-飞行时间质谱仪的设计和校准。
J Am Soc Mass Spectrom. 1995 Aug;6(8):619-26. doi: 10.1016/1044-0305(95)00262-C.
10
High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas.
Rev Sci Instrum. 2017 Mar;88(3):033506. doi: 10.1063/1.4978526.

本文引用的文献

1
Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography.激光产生的锡等离子体中多激发态对纳米光刻的显著辐射贡献。
Nat Commun. 2020 May 11;11(1):2334. doi: 10.1038/s41467-020-15678-y.
2
High-rate dead-time corrections in a general purpose digital pulse processing system.通用数字脉冲处理系统中的高速死区时间校正
J Synchrotron Radiat. 2015 Sep;22(5):1190-201. doi: 10.1107/S1600577515013776. Epub 2015 Aug 7.
3
On the dead time problem of a GM counter.关于盖革-米勒计数器的死时间问题。
Appl Radiat Isot. 2009 Jun;67(6):1094-8. doi: 10.1016/j.apradiso.2009.01.074. Epub 2009 Feb 23.
4
A new G-M counter dead time model.
Appl Radiat Isot. 2000 Oct;53(4-5):731-7. doi: 10.1016/s0969-8043(00)00261-x.
5
Mean and variance of single photon counting with deadtime.存在死时间时单光子计数的均值和方差。
Phys Med Biol. 2000 Jul;45(7):2043-56. doi: 10.1088/0031-9155/45/7/324.