Fu Daokuo, Fan Pingqing, Yuan Tao, Wang Yansong
School of Mechanical and Automotive Engineering, University of Engineering Science, Shanghai 201620, China.
Rev Sci Instrum. 2022 Feb 1;93(2):025003. doi: 10.1063/5.0057254.
A novel standing wave linear ultrasonic motor with double driving feet based on longitudinal-bending coupling mode is designed in this study. The motor adopts the bonded-type structure, and four pieces of piezoelectric ceramics on a metal beam are divided into two groups. Two voltages with 90° phase difference are applied to two groups of Pb-based lanthanumdoped zirconate titanates ceramics, respectively. Then the first longitudinal and second bending modes generated are superimposed on the stator, which can produce elliptical motion trajectories on the driving feet. The excitation method and driving mechanism of the motor are illustrated in detail. A finite model of the stator is established in the ANSYS parametric design language interface, and the operating mode of the stator and motion trajectories on the driving feet are discussed. The prototype is fabricated, and its impedance characteristics and mechanical output performance are tested. The results show that the maximal no-load velocity of the motor is ∼147.78 mm/s under a voltage of 200 V and a preload of 3 N. The maximum thrust force is ∼1.1 N when the voltage and preload are 200 V and 6 N, respectively.
本研究设计了一种基于纵弯耦合模式的新型双驱动足驻波直线超声电机。该电机采用粘结型结构，金属梁上的四块压电陶瓷分为两组。分别向两组铅基镧掺杂锆钛酸铅陶瓷施加相位差为90°的两个电压。然后，在定子上叠加产生的一阶纵向模态和二阶弯曲模态，这会在驱动足上产生椭圆运动轨迹。详细阐述了电机的激励方法和驱动机制。在ANSYS参数设计语言界面中建立了定子的有限元模型，并讨论了定子的工作模态和驱动足上的运动轨迹。制作了样机，并测试了其阻抗特性和机械输出性能。结果表明，在200 V电压和3 N预载下，电机的最大空载速度约为147.78 mm/s。当电压和预载分别为200 V和6 N时，最大推力约为1.1 N。
