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用于可穿戴压阻式传感器的纳米结构材料及制造工艺的现状与展望

The status and perspectives of nanostructured materials and fabrication processes for wearable piezoresistive sensors.

作者信息

Chiappim William, Fraga Mariana Amorim, Furlan Humber, Ardiles David César, Pessoa Rodrigo Sávio

机构信息

Departamento de Física, Laboratório de Plasmas e Processos, Instituto Tecnológico de Aeronáutica, São José dos Campos, 12228-900 Brazil.

Escola de Engenharia, Universidade Presbiteriana Mackenzie, São Paulo, SP 01302-907 Brazil.

出版信息

Microsyst Technol. 2022;28(7):1561-1580. doi: 10.1007/s00542-022-05269-w. Epub 2022 Mar 17.

Abstract

The wearable sensors have attracted a growing interest in different markets, including health, fitness, gaming, and entertainment, due to their outstanding characteristics of convenience, simplicity, accuracy, speed, and competitive price. The development of different types of wearable sensors was only possible due to advances in smart nanostructured materials with properties to detect changes in temperature, touch, pressure, movement, and humidity. Among the various sensing nanomaterials used in wearable sensors, the piezoresistive type has been extensively investigated and their potential have been demonstrated for different applications. In this review article, the current status and challenges of nanomaterials and fabrication processes for wearable piezoresistive sensors are presented in three parts. The first part focuses on the different types of sensing nanomaterials, namely, zero-dimensional (0D), one-dimensional (1D), two-dimensional (2D), and three-dimensional (3D) piezoresistive nanomaterials. Then, in second part, their fabrication processes and integration are discussed. Finally, the last part presents examples of wearable piezoresistive sensors and their applications.

摘要

可穿戴传感器因其具有方便、简单、准确、快速和价格具有竞争力等突出特点,在包括健康、健身、游戏和娱乐在内的不同市场中引起了越来越广泛的关注。不同类型可穿戴传感器的发展得益于智能纳米结构材料的进步,这些材料具有检测温度、触摸、压力、运动和湿度变化的特性。在可穿戴传感器中使用的各种传感纳米材料中,压阻型材料已得到广泛研究,并且其在不同应用中的潜力也已得到证明。在这篇综述文章中,可穿戴压阻传感器的纳米材料和制造工艺的现状与挑战分为三个部分进行阐述。第一部分重点介绍不同类型的传感纳米材料,即零维(0D)、一维(1D)、二维(2D)和三维(3D)压阻纳米材料。然后,在第二部分中,讨论了它们的制造工艺和集成。最后,最后一部分介绍了可穿戴压阻传感器的实例及其应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5143/8926892/22d51c8ea218/542_2022_5269_Fig1_HTML.jpg

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