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Design and fabrication of SU-8 polymer arrayed waveguide gratings based on flexible PDMS substrates.

作者信息

Li Hongqiang, Wang Yingjie, Sun Yaqiang, Zhang Sai, An Zhixuan, Zhang Shanshan, Zhang Cheng, Zhang Zanyun, Mao Quanhua, Prades García Juan Daniel

出版信息

Appl Opt. 2022 Mar 20;61(9):2213-2218. doi: 10.1364/AO.447132.

DOI:10.1364/AO.447132
PMID:35333236
Abstract

We investigated and fabricated 1×8 and 1×16 traditional/saddle arrayed waveguide grating (AWG) wavelength division multiplexing devices on flexible substrates. The core layer was made of the negative epoxy photoresist SU-8, and polydimethylsiloxane (PDMS) material was selected for the cladding based on the high refractive index difference. A chemical modification method of PDMS was proposed to enhance the film-forming characteristics of the SU-8 core layer on PDMS substrates. After fabricating and characterizing the optical properties of the AWGs, the dimensions of the proposed 1×8 and 1×16 AWGs were 0.9×0.8 and 1.1×0.9, respectively. Experimental results showed that the saddle-type 1×8 and 1×16 AWGs had good signal transmission characteristics, and the insertion losses were only 5.1 dB and 6.8 dB, respectively, which were lower than those of traditional-type AWGs with the same dimensions and number of waveguides.

摘要

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