Zhao Yinming, Tan Siyang, Zhang Chaofan, Liu Yang, Wang Linglu, Li Yongqian, Hao Qun
Beijing Changcheng Institute of Metrology & Measurement, Beijing 100095, China.
Key Laboratory of Micro/Nano Systems for Aerospace of Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China.
Micromachines (Basel). 2022 Feb 26;13(3):379. doi: 10.3390/mi13030379.
Creep behavior and fatigue life are important performance indexes that affect the long-term stability of resistive strain gauges. The resistive strain gauges, fabricated with wet etching and resistance trimming, present micro-morphology such as textures and uneven edges on the surface and side-wall profile of sensitive grids. This paper observed the micro-morphology of the sensitive grids by microscope and analyzed its range of geometric dimensions. A sine function was used to establish equivalent geometric models for the surface textures and side-wall profile. Based on time hardening theory and the S-N curve, the dependence of micro-morphology of metal resistive strain gauges on creep behavior and fatigue life was studied. The results indicate that the roughness of micro-morphology has an influence on creep behavior and fatigue life. The surface textures and side-wall profile lead to the increase of creep strain and the decrease of fatigue life in varying degrees. When 60% of the ultimate stress of the strain gauges is loaded, the average creep strain in steady-state calculated by the maximum roughness of the side-wall profile reaches up to 6.95 times that of the perfect flat surface. Under the condition of loading 70% of the ultimate stress and the same roughness, the fatigue life led by side-wall profile could be reduced to 1/25 of the textured surface. The obtained achievements promote an understanding for optimizing the fabrication process of resistive strain gauges as well as developing high-precision and long-life force sensors.
蠕变行为和疲劳寿命是影响电阻应变片长期稳定性的重要性能指标。采用湿法蚀刻和电阻微调制造的电阻应变片,其敏感栅的表面和侧壁轮廓呈现出纹理和边缘不平整等微观形貌。本文通过显微镜观察敏感栅的微观形貌,并分析其几何尺寸范围。利用正弦函数建立表面纹理和侧壁轮廓的等效几何模型。基于时间硬化理论和S-N曲线,研究了金属电阻应变片微观形貌对蠕变行为和疲劳寿命的依赖性。结果表明,微观形貌的粗糙度对蠕变行为和疲劳寿命有影响。表面纹理和侧壁轮廓在不同程度上导致蠕变应变增加和疲劳寿命降低。当加载应变片极限应力的60%时,由侧壁轮廓最大粗糙度计算得到的稳态平均蠕变应变达到理想平面的6.95倍。在加载极限应力的70%且粗糙度相同的条件下,侧壁轮廓导致的疲劳寿命可降低至纹理表面的1/25。所取得的成果有助于理解优化电阻应变片制造工艺以及开发高精度、长寿命力传感器。