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烧结碳化硅端面铣削中韧性切削状态的实验分析

Experimental Analysis of Ductile Cutting Regime in Face Milling of Sintered Silicon Carbide.

作者信息

Groeb Marvin, Hagelüken Lorenz, Groeb Johann, Ensinger Wolfgang

机构信息

Kern Microtechnik GmbH, 82438 Eschenlohe, Germany.

Department of Materials Science, Technical University of Darmstadt, 64287 Darmstadt, Germany.

出版信息

Materials (Basel). 2022 Mar 24;15(7):2409. doi: 10.3390/ma15072409.

DOI:10.3390/ma15072409
PMID:35407743
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8999765/
Abstract

In this study, sintered silicon carbide is machined on a high-precision milling machine with a high-speed spindle, closed-loop linear drives and friction-free micro gap hydrostatics. A series of experiments was undertaken varying the relevant process parameters such as feedrate, cutting speed and chip thickness. For this, the milled surfaces are characterized in a process via an acoustic emission sensor. The milled surfaces were analyzed via confocal laser scanning microscopy and the ISO 25178 areal surface quality parameters such as Sa, Sq and Smr are determined. Moreover, scanning electron microscopy was used to qualitatively characterize the surfaces, but also to identify sub-surface damages such as grooves, breakouts and pitting. Raman laser spectroscopy is used to identify possible amorphization and changes to crystal structure. We used grazing incidence XRD to analyze the crystallographic structure and scanning acoustic microscopy to analyze sub-surface damages. A polycrystalline diamond tool was able to produce superior surfaces compared to diamond grinding with an areal surface roughness Sa of below 100 nm in a very competitive time frame. The finished surface exhibits a high gloss and reflectance. It can be seen that chip thickness and cutting speed have a major influence on the resulting surface quality. The undamaged surface in combination with a small median chip thickness is indicative of a ductile cutting regime.

摘要

在本研究中,采用具有高速主轴、闭环直线驱动和无摩擦微间隙液体静压装置的高精度铣床对烧结碳化硅进行加工。进行了一系列实验,改变了诸如进给速度、切削速度和切屑厚度等相关工艺参数。为此,通过声发射传感器在加工过程中对铣削表面进行表征。通过共聚焦激光扫描显微镜对铣削表面进行分析,并确定了ISO 25178表面质量参数,如Sa、Sq和Smr。此外,利用扫描电子显微镜对表面进行定性表征,同时识别诸如沟槽、崩边和麻点等亚表面损伤。拉曼激光光谱用于识别可能的非晶化和晶体结构变化。我们使用掠入射X射线衍射分析晶体结构,并使用扫描声学显微镜分析亚表面损伤。与金刚石磨削相比,在极具竞争力的时间范围内,聚晶金刚石刀具能够加工出表面粗糙度Sa低于100 nm的优质表面。加工后的表面具有高光泽度和反射率。可以看出,切屑厚度和切削速度对最终的表面质量有重大影响。未受损的表面与较小的中位切屑厚度相结合表明处于延性切削状态。

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