Nguyen Huu-Thang, Jeng Jen-Tzong, Doan Van-Dong, Dinh Chinh-Hieu, Trinh Xuan Thang, Dao Duy-Vinh
Department of Mechanical Engineering, National Kaohsiung University of Science and Technology, Kaohsiung 807618, Taiwan.
Faculty of Mechanical Engineering, Hung Yen University of Technology and Education, Hung Yen 160000, Vietnam.
Sensors (Basel). 2022 Apr 18;22(8):3097. doi: 10.3390/s22083097.
The eddy-current (EC) testing method is frequently utilized in the nondestructive inspection of conductive materials. To detect the minor and complex-shaped defects on the surface and in the underlying layers of a metallic sample, a miniature eddy-current probe with high sensitivity is preferred for enhancing the signal quality and spatial resolution of the obtained eddy-current images. In this work, we propose a novel design of a miniature eddy-current probe using a giant magnetoresistance (GMR) sensor fabricated on a silicon chip. The in-house-made GMR sensor comprises two cascaded spin-valve elements in parallel with an external variable resistor to form a Wheatstone bridge. The two elements on the chip are excited by the alternating magnetic field generated by a tiny coil aligned to the position that balances the background output of the bridge sensor. In this way, the two GMR elements behave effectively as an axial gradiometer with the bottom element sensitive to the surface and near-surface defects on a conductive specimen. The performance of the EC probe is verified by the numerical simulation and the corresponding experiments with machined defects on metallic samples. With this design, the geometric characteristics of the defects are clearly visualized with a spatial resolution of about 1 mm. The results demonstrate the feasibility and superiority of the proposed miniature GMR EC probe for characterizing the small and complex-shaped defects in multilayer conductive samples.
涡流(EC)检测方法常用于导电材料的无损检测。为了检测金属样品表面和下层的微小且形状复杂的缺陷,具有高灵敏度的微型涡流探头更受青睐,以提高所获涡流图像的信号质量和空间分辨率。在这项工作中,我们提出了一种新型微型涡流探头的设计,该探头使用在硅芯片上制造的巨磁阻(GMR)传感器。自制的GMR传感器包括两个级联的自旋阀元件,与一个外部可变电阻器并联,形成一个惠斯通电桥。芯片上的两个元件由一个微小线圈产生的交变磁场激发,该线圈对准平衡桥式传感器背景输出的位置。通过这种方式,两个GMR元件有效地充当轴向梯度仪,底部元件对导电试样表面和近表面缺陷敏感。通过数值模拟和对金属样品上加工缺陷的相应实验验证了EC探头的性能。采用这种设计,缺陷的几何特征以约1mm的空间分辨率清晰可见。结果证明了所提出的微型GMR EC探头用于表征多层导电样品中小的和形状复杂的缺陷的可行性和优越性。