Broadband polarization-insensitive metalens integrated with a charge-coupled device in the short-wave near-infrared range.

The performance of a charge-coupled device is important in detection accuracy for terminal sensitivity of a short-wave near-infrared spectrometer. The sizes of pixel pitch and pixel itself are reducing with the development of CCD technologies. However, the fill factor of CCD pixels has not been significantly improved due to the limits of the shift registers, which makes a lower utilization rate of incident light of CCD. In recent years, the advance of metasurface optics provides a new solution for solving this problem. In this paper, a polarization-insensitive metalens is experimentally demonstrated to increase the fill factor of short-wave near-infrared CCD pixels by 4 times, and the simulated results show that the designed metalens has an excellent optical crosstalk (≤0.8%). It proves that the fill factor of CCD pixels can be further improved by the proposed approach which would pave the way for the overall integration of metalens array and photodetectors, as well as the development of CCD miniaturization and lightweight.