Hu Huan, Ma Jiajun, Yuan Wen, Peng Qiuxia, Yang Junxiao
State Key Laboratory of Environmental-friendly Energy Materials, School of Material Science and Engineering, Southwest University of Science and Technology Mianyang 621010 P. R. China
RSC Adv. 2020 Mar 24;10(20):11898-11902. doi: 10.1039/d0ra01122c. eCollection 2020 Mar 19.
One of the main challenges for dielectric materials for advanced microelectronics is their high dielectric value and brittleness. In this study, we adopted a hard-soft-hybrid strategy and successfully introduced a hard, soft segment and covalent crosslinked structural unit into a hybridized skeleton copolymerization of polydimethylsiloxane (PDMS), benzocyclobutene (BCB) and double-decker-shaped polyhedral silsesquioxanes (DDSQ) by a platinum-catalyzed hydrosilylation reaction, thus producing a random copolymer (PDBD) with a hybridized skeleton in the main chain. PDBD exhibited high molecular weight and thermal curing action without any catalyst. More importantly, the cured copolymer displayed high flexibility, high thermal stability and low dielectric constant, evidencing its potential applications in high-performance dielectric materials.
先进微电子领域介电材料面临的主要挑战之一是其高介电值和脆性。在本研究中,我们采用了硬 - 软混合策略,并通过铂催化的硅氢加成反应成功地将硬段、软段和共价交联结构单元引入到聚二甲基硅氧烷(PDMS)、苯并环丁烯(BCB)和双层多面体倍半硅氧烷(DDSQ)的杂化骨架共聚物中,从而制备出主链具有杂化骨架的无规共聚物(PDBD)。PDBD表现出高分子量且无需任何催化剂即可进行热固化反应。更重要的是,固化后的共聚物具有高柔韧性、高热稳定性和低介电常数,证明了其在高性能介电材料中的潜在应用价值。