Geng Yanquan, Wang Jiqiang, Li Zihan, Yan Yongda, Zhang Jingran, Gan Yang
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, People's Republic of China.
Center for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, People's Republic of China.
Nanoscale Res Lett. 2022 May 2;17(1):49. doi: 10.1186/s11671-022-03686-4.
Fabrication of periodic nanostructures has drawn increasing interest owing to their applications of such functional structures in optics, biomedical and power generation devices. Nano-indentation technique has been proven as a method to fabricate periodic nanostructures. In this study, the molecular dynamic simulation approach is employed to investigate the nano-indentation process for fabricating periodic nano-pit arrays using a single indenter and an indenter array. The morphologies of indentations that machined using these two kinds of indenters are compared. The indentation force and the defect evolution during the nano-indentation process are further studied. Results show that indentation morphologies obtained by single indenter are mainly depended on the spacing of indenters, and a nano-pit array with a better shape and consistency can be obtained easier using the indenter array compared with using a single indenter. The stacking faults and dislocations induced by indentation are depended on the spacing of the indenters. Our findings are significant for understanding the differences of indentation processes using a single indenter and an indenter array and machining a high-quality periodic nano-pit array with high machining efficiency.
由于周期性纳米结构在光学、生物医学和发电设备等功能结构中的应用，其制造已引起越来越多的关注。纳米压痕技术已被证明是一种制造周期性纳米结构的方法。在本研究中，采用分子动力学模拟方法研究了使用单个压头和压头阵列制造周期性纳米坑阵列的纳米压痕过程。比较了使用这两种压头加工得到的压痕形貌。进一步研究了纳米压痕过程中的压痕力和缺陷演变。结果表明，单个压头获得的压痕形貌主要取决于压头间距，与单个压头相比，使用压头阵列更容易获得形状和一致性更好的纳米坑阵列。压痕引起的堆垛层错和位错取决于压头间距。我们的研究结果对于理解使用单个压头和压头阵列的压痕过程差异以及以高加工效率加工高质量周期性纳米坑阵列具有重要意义。
