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Gallium-tin alloys as a low melting point liquid metal for repetition-pulse-laser-induced high energy density state toward compact pulse EUV sources.

作者信息

Andrew Musgrave Christopher Stephen, Lu Nan, Sato Rie, Nagai Keiji

机构信息

Laboratory for Chemical and Life Sciences, Institute of Innovative Research, Tokyo Institute of Technology R1-26 Suzukake-dai, Midori-ku Yokohama 226-8503 Japan

出版信息

RSC Adv. 2019 May 7;9(24):13927-13932. doi: 10.1039/c9ra01905g. eCollection 2019 Apr 30.

DOI:10.1039/c9ra01905g
PMID:35519559
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9064005/
Abstract

Here, we show the easy-handling of a liquid gallium-tin alloy (Ga : Sn) as a laser target source for 13.5 nm light generation. The alloys have ∼30 °C freezing points according to a differential scanning calorimetry cooling process. A Nd:YAG laser (1064 nm, 1 ns, 7.1 × 10 W cm) ablated the alloys, obtaining a similar extreme ultraviolet emission intensity to Sn despite a small quantity of Sn. Finally, we demonstrate a liquid metal alloy jet and droplets using a plastic nozzle for high-repetition target supply.

摘要
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/7eae15586fdd/c9ra01905g-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/548c210b5282/c9ra01905g-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/2ec418231c97/c9ra01905g-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/636c7fa39672/c9ra01905g-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/6c25cf0003b5/c9ra01905g-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/7eae15586fdd/c9ra01905g-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/548c210b5282/c9ra01905g-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/2ec418231c97/c9ra01905g-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/636c7fa39672/c9ra01905g-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/6c25cf0003b5/c9ra01905g-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0849/9064005/7eae15586fdd/c9ra01905g-f5.jpg

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引用本文的文献

1
Easy-handling minimum mass laser target scaffold based on sub-millimeter air bubble -An example of laser plasma extreme ultraviolet generation.基于亚毫米气泡的易于操作的最小质量激光靶支架——激光等离子体极紫外光产生的一个实例
Sci Rep. 2020 Apr 3;10(1):5906. doi: 10.1038/s41598-020-62858-3.

本文引用的文献

1
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ACS Omega. 2018 Oct 2;3(10):12422-12427. doi: 10.1021/acsomega.8b01220. eCollection 2018 Oct 31.
2
Room temperature CO reduction to solid carbon species on liquid metals featuring atomically thin ceria interfaces.室温下液态金属表面原子层厚度氧化铈界面将 CO 还原为固态碳物种。
Nat Commun. 2019 Feb 26;10(1):865. doi: 10.1038/s41467-019-08824-8.
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液态金属：化学中的基础原理及应用。
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Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources.用于极紫外光刻光源的激光产生的锡等离子体的电子密度和温度的时间分辨二维分布。
Sci Rep. 2017 Oct 2;7(1):12328. doi: 10.1038/s41598-017-11685-0.
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High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas.
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