Pei Wenli, Zhao Dong, Chen Xianghui, Wang Xiaoyang, Yang Xingbo, Wang Jianjun, Li Zhijie, Zhou Lihu
Key Laboratory for Anisotropy and Texture of Materials, College of Materials Science and Engineering, Northeastern University Shenyang 110819 China
Demeter (Suzhou) Electronic Environmental Protection Material Co., Ltd. Suzhou 215000 China.
RSC Adv. 2019 Aug 27;9(46):26996-27001. doi: 10.1039/c9ra05751j. eCollection 2019 Aug 23.
Ceria-based compounds with additions of La and F (CLF compounds) were prepared by using industrial-grade fluorinated lanthanum cerium carbonate as a precursor a facile calcination method. The evolution of phase structures of the compounds during preparation and the relationship between the structure and the polishing performance were investigated. The compounds consist of three phases: CeO, LaOF, and LaF. The phase component could be controlled by tuning the calcination process. A higher degree of fluorination and a higher calcination temperature led to the formation of more LaOF and less LaF phases. The LaOF phase performs a higher stock removal rate. The best polishing efficiency was achieved with LaOF phase ratio around 18%. Intermetallic LaF is a low-hardness phase and is easily crushed during polishing, which lowers the removal rate and shortens the useful life of the polishing powder.
以工业级氟化镧铈碳酸盐为前驱体，采用简便的煅烧方法制备了添加La和F的铈基化合物（CLF化合物）。研究了化合物在制备过程中的相结构演变以及结构与抛光性能之间的关系。这些化合物由CeO、LaOF和LaF三相组成。通过调整煅烧过程可以控制相组成。较高的氟化程度和较高的煅烧温度导致形成更多的LaOF相和更少的LaF相。LaOF相具有较高的磨削率。当LaOF相比率约为18%时，可实现最佳抛光效率。金属间化合物LaF是一种低硬度相，在抛光过程中容易破碎，这会降低去除率并缩短抛光粉的使用寿命。
