Lin Ru, Hu Qi, Liu Zuolian, Pan Shusheng, Chen Zhifeng, Zhang Wei, Liu Zhiyu, Zhang Shaolin, Zhang Chengyun
School of Physics and Materials Sciences, Guangzhou University, Guangzhou 510006, China.
School of Electronics and Communication Engineering, Guangzhou University, Guangzhou 510006, China.
Nanomaterials (Basel). 2022 May 2;12(9):1533. doi: 10.3390/nano12091533.
A large area of randomly distributed nanospike as nanostructured template was induced by femtosecond (fs) laser on a silicon substrate in water. Copper oxide (CuO) and palladium (Pd) heterostructured nanofilm were coated on the nanospikes by magnetron sputtering technology and vacuum thermal evaporation coating technology respectively for the construction of a p-type hydrogen sensor. Compared with the conventional gas sensor based on CuO working at high temperature, nanostructured CuO/Pd heterostructure exhibited promising detection capability to hydrogen at room temperature. The detection sensitivity to 1% H was 10.8%, the response time was 198 s, and the detection limit was as low as 40 ppm, presenting an important application prospect in the clean energy field. The excellent reusability and selectivity of the CuO/Pd heterostructure sensor toward H at room temperature were also demonstrated by a series of cyclic response characteristics. It is believed that our room-temperature hydrogen sensor fabricated with a waste-free green process, directly on silicon substrate, would greatly promote the future fabrication of a circuit-chip integrating hydrogen sensor.
在水中，通过飞秒（fs）激光在硅衬底上诱导出大面积随机分布的纳米尖刺作为纳米结构模板。分别采用磁控溅射技术和真空热蒸发镀膜技术在纳米尖刺上包覆氧化铜（CuO）和钯（Pd）异质结构纳米薄膜，用于构建p型氢传感器。与基于CuO在高温下工作的传统气体传感器相比，纳米结构的CuO/Pd异质结构在室温下对氢气表现出有前景的检测能力。对1%氢气的检测灵敏度为10.8%，响应时间为198秒，检测限低至40 ppm，在清洁能源领域呈现出重要的应用前景。一系列循环响应特性也证明了CuO/Pd异质结构传感器在室温下对氢气具有优异的可重复使用性和选择性。相信我们采用无废绿色工艺直接在硅衬底上制造的室温氢传感器将极大地推动未来集成氢传感器的电路芯片制造。
