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旋涂过程中通过原位退火实现自组装嵌段共聚物图案的单步工艺。

Single Step Process for Self-Assembled Block Copolymer Patterns via in Situ Annealing during Spin-Casting.

作者信息

Jung Hyunjung, Woo Sanghoon, Choe Youngson, Ryu Du Yeol, Huh June, Bang Joona

机构信息

Department of Chemical and Biological Engineering, Korea University, Seoul 136-713, Republic of Korea.

Department of Chemical Engineering, Pusan National University, Kumjeong-ku, Busan 609-735, Republic of Korea.

出版信息

ACS Macro Lett. 2015 Jun 16;4(6):656-660. doi: 10.1021/acsmacrolett.5b00214. Epub 2015 Jun 3.

DOI:10.1021/acsmacrolett.5b00214
PMID:35596409
Abstract

We demonstrated a simple and time-efficient processing method for facilitating a microphase separation of block copolymers (BCPs) based on a single step of spin-casting with low volatile solvent and in situ annealing. Well-ordered lamellar patterns of poly(styrene--methyl methacrylate) BCP films having wide range of molecular weights (51-235 kg/mol) were fabricated by a single 3 min process of spin-casting, even without the conventional pretreatment of substrate neutralization. The formation of this well-ordered lamellar structure is attributed to a synergetic effect between slow solvent evaporation and thermal energy that may provide an efficient cooling profile for the BCP film during the spin-casting process.

摘要

我们展示了一种简单且省时的处理方法,用于促进嵌段共聚物(BCP)的微相分离,该方法基于使用低挥发性溶剂的单步旋涂和原位退火。通过单次3分钟的旋涂过程,制备出了具有广泛分子量范围(51-235 kg/mol)的聚(苯乙烯-甲基丙烯酸甲酯)BCP薄膜的有序层状图案,甚至无需进行传统的基底中和预处理。这种有序层状结构的形成归因于缓慢的溶剂蒸发和热能之间的协同效应,这可能在旋涂过程中为BCP薄膜提供有效的冷却曲线。

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