IEEE Trans Biomed Circuits Syst. 2022 Aug;16(4):502-510. doi: 10.1109/TBCAS.2022.3183856. Epub 2022 Oct 12.
Super-resolution imaging is a family of techniques in which multiple lower-resolution images can be merged to produce a single image at higher resolution. While super-resolution is often applied to optical systems, it can also be used with other imaging modalities. Here we demonstrate a 512 × 256 CMOS sensor array for micro-scale super-resolution electrochemical impedance spectroscopy (SR-EIS) imaging. The system is implemented in standard 180 nm CMOS technology with a 10 μm × 10 μm pixel size. The sensor array is designed to measure the mutual capacitance between programmable sets of pixel pairs. Multiple spatially-resolved impedance images can then be computationally combined to generate a super-resolution impedance image. We use finite-element electrostatic simulations to support the proposed measurement approach and discuss straightforward algorithms for super-resolution image reconstruction. We present experimental measurements of sub-cellular permittivity distribution within single green algae cells, showing the sensor's capability to produce microscale impedance images with sub-pixel resolution.
超分辨率成像是一组技术，通过这些技术，可以将多个低分辨率图像合并为单个高分辨率图像。虽然超分辨率通常应用于光学系统，但它也可以与其他成像模式一起使用。在这里，我们展示了一个用于微尺度超分辨率电化学阻抗谱（SR-EIS）成像的 512×256 CMOS 传感器阵列。该系统采用标准的 180nm CMOS 技术实现，像素尺寸为 10μm×10μm。传感器阵列设计用于测量可编程像素对组之间的互电容。然后可以通过计算将多个空间分辨阻抗图像组合以生成超分辨率阻抗图像。我们使用有限元静电模拟来支持所提出的测量方法，并讨论了超分辨率图像重建的简单算法。我们展示了单个绿藻细胞内亚细胞介电常数分布的实验测量结果，表明该传感器具有以亚像素分辨率生成微尺度阻抗图像的能力。
