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用于微位移的带局部环形电极压电圆盘的有限元建模与测试

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement.

作者信息

Liu Yonggang, Zhang Shuliang, Yan Pengfei, Li Hiji

机构信息

School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China.

Collaborative Innovation Center of Machinery Equipment Advanced Manufacturing of Henan Province, Henan University of Science and Technology, Luoyang 471003, China.

出版信息

Micromachines (Basel). 2022 Jun 16;13(6):951. doi: 10.3390/mi13060951.

DOI:10.3390/mi13060951
PMID:35744567
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9227544/
Abstract

A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators. Finite element models were established according to the structural characteristics of the actuator and static analysis was carried out based on ANSYS software. Then Ø25 mm × 2 mm samples were prepared. The displacement detection system was established, and the influence of electrode structure on radial displacement was studied experimentally. A comparison between the experimental results and the finite element analysis confirmed that the finite element model was correct. The results showed that the effect of electrode width on displacement was small. With decrease in electrode center distance and increase in the number of electrodes pairs, the radial displacement increased correspondingly. The peak of radial displacement was 1.63 μm under a 200 V voltage excitation voltage of 0.2 Hz. This was 2.5 times that for a conventional electrode piezo disk with the same structure. The actuator demonstrated better displacement properties. The piezoelectric disk could be valuable in applications involving micro-nano devices.

摘要

针对压电致动器的大位移需求，研究了一种结合叉指环形电极和PZT - 52（锆钛酸铅）圆盘的新型压电致动器。根据致动器的结构特点建立了有限元模型，并基于ANSYS软件进行了静态分析。然后制备了直径为25 mm×2 mm的样品。建立了位移检测系统，通过实验研究了电极结构对径向位移的影响。实验结果与有限元分析的比较证实了有限元模型的正确性。结果表明，电极宽度对位移的影响较小。随着电极中心距的减小和电极对数的增加，径向位移相应增大。在200 V电压、0.2 Hz激励电压下，径向位移峰值为1.63μm。这是具有相同结构的传统电极压电圆盘的2.5倍。该致动器表现出更好的位移特性。该压电圆盘在涉及微纳器件的应用中可能具有重要价值。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/ffd3846da124/micromachines-13-00951-g018.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/777e145612ce/micromachines-13-00951-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/dff71c504144/micromachines-13-00951-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/cff0f660cf68/micromachines-13-00951-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/98ac67e9a468/micromachines-13-00951-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/35e8e1d9838c/micromachines-13-00951-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/6d0785b5bfc4/micromachines-13-00951-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/f89e291d38da/micromachines-13-00951-g013.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db68/9227544/ffd3846da124/micromachines-13-00951-g018.jpg

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