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静电悬浮加速度计电荷积累抑制方法研究

Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer.

作者信息

Dai Jiefeng, Wang Wenrui, Wu Bin, Ye Lingyun, Song Kaichen

机构信息

College of Biomedical Engineering and Instrument Science, Zhejiang University, Hangzhou 310027, China.

School of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310027, China.

出版信息

Sensors (Basel). 2022 Jun 29;22(13):4930. doi: 10.3390/s22134930.

DOI:10.3390/s22134930
PMID:35808419
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9269488/
Abstract

Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to suppress the acceleration noise due to deposited charge. A model of the electrostatic force on the mass is established and the deviation voltage is found to be the dominant source of charge noise. Based on the analysis of disturbance electrostatic force under DC and AC signals, actuation combined with DC and AC voltage is designed and the disturbance force due to charge can be suppressed through adjustment towards the duty cycle of different compositions. Simulations and experiments are carried out and the results indicate that the disturbance due to charge can be suppressed up to 40%, which validates the efficiency of the scheme.

摘要

静电悬浮加速度计（ESA）广泛应用于高精度加速度测量。然而，隔离质量块上存在累积电荷，这会损害ESA的精度和稳定性。本文提出施加具有组合波形的驱动电压，以抑制由沉积电荷引起的加速度噪声。建立了作用在质量块上的静电力模型，发现偏差电压是电荷噪声的主要来源。基于对直流和交流信号下干扰静电力的分析，设计了直流和交流电压相结合的驱动方式，通过调整不同成分的占空比可以抑制电荷引起的干扰力。进行了仿真和实验，结果表明电荷引起的干扰可抑制高达40%，验证了该方案的有效性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bc2e/9269488/e3fc788ecbaf/sensors-22-04930-g018.jpg
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Micromachines (Basel). 2021 Dec 28;13(1):38. doi: 10.3390/mi13010038.
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Cold starting temperature time-related compensation model of inertial sensors based on particle swarm optimization algorithm.
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4
A charge control method for space-mission inertial sensor using differential UV LED emission.一种利用差分紫外发光二极管发射的空间任务惯性传感器电荷控制方法。
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5
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8
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9
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10
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