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COC驻极体传感器及传感器阵列的设计、制造、结构优化与压力传感演示

Design, Fabrication, Structure Optimization and Pressure Sensing Demonstration of COC Piezoelectret Sensor and Sensor Array.

作者信息

Wang Hui, Wang Xiaolin, Wadsworth Matthew, Ahmed Mohammad Faisal, Liu Zhe, Zeng Changchun

机构信息

Department of Industrial and Manufacturing, High-Performance Materials Institute, FAMU-FSU College of Engineering, Florida State University, Tallahassee, FL 32310, USA.

出版信息

Micromachines (Basel). 2022 Jul 26;13(8):1177. doi: 10.3390/mi13081177.

DOI:10.3390/mi13081177
PMID:35893175
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9394335/
Abstract

This study reported on the design and fabrication of a pseudo-piezoelectric material (piezoelectret) from cyclic olefin copolymer (COC) based on a micropillar structure. The fabrication feasibility of such structure was explored and piezoelectret with the good piezoelectric activity (characterized by quasi-static piezoelectric coefficient ) was demonstrated. Response surface method with a central composite design was employed to investigate the effects of the structure parameter on the piezoelectric coefficient . An optimal structure design was obtained and was validated by experiments. With the optimal design, can reach an exceptional high value of ~9000 pC/N under low pressure. The charging process and the electrical and electromechanical characteristics were further investigated by experimentation and modeling. We further demonstrated the scalability of the fabrication process and demonstrated the application of these sensors in position specific pressure sensing (pressure mapping).

摘要

本研究报道了基于微柱结构由环烯烃共聚物（COC）制备伪压电材料（驻极体）的设计与制造。探索了这种结构的制造可行性，并展示了具有良好压电活性（以准静态压电系数表征）的驻极体。采用具有中心复合设计的响应面法研究结构参数对压电系数的影响。获得了最优结构设计并通过实验进行了验证。采用最优设计时，在低压下d33可达到约9000 pC/N的极高值。通过实验和建模进一步研究了充电过程以及电气和机电特性。我们进一步证明了制造工艺的可扩展性，并展示了这些传感器在位置特定压力传感（压力映射）中的应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/05f1f15bf85b/micromachines-13-01177-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/0bf474ffd99e/micromachines-13-01177-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/067ec550ad05/micromachines-13-01177-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/724d50401cf4/micromachines-13-01177-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/69c7dd57c846/micromachines-13-01177-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/ed576ac3688b/micromachines-13-01177-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/9dcf898a1156/micromachines-13-01177-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/8748a1ead34f/micromachines-13-01177-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/2a101e0d3e7b/micromachines-13-01177-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/6d02a47a9b1d/micromachines-13-01177-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/05f1f15bf85b/micromachines-13-01177-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/0bf474ffd99e/micromachines-13-01177-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/067ec550ad05/micromachines-13-01177-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/724d50401cf4/micromachines-13-01177-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/69c7dd57c846/micromachines-13-01177-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/ed576ac3688b/micromachines-13-01177-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/9dcf898a1156/micromachines-13-01177-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/8748a1ead34f/micromachines-13-01177-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/2a101e0d3e7b/micromachines-13-01177-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/6d02a47a9b1d/micromachines-13-01177-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/68c9/9394335/05f1f15bf85b/micromachines-13-01177-g010.jpg

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