Jiang Heng, Zeng Yibo, Zhang Jie, Chen Yanli, Guo Hang, Li Lei, Zhang Ying
College of Materials, Xiamen University, Xiamen, Fujian 361005, People's Republic of China.
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, Fujian 361005, People's Republic of China.
Nanotechnology. 2022 Aug 23;33(45). doi: 10.1088/1361-6528/ac84e1.
Thin film microbattery is urgently needed to provide a long-term stable on-chip power for various kinds of microdevices or microsystems. Anode is a core component in thin film lithium ion microbattery, however, previous researches mostly focused on metal oxide or Si-based thin film anodes, and the reports of metal sulfide thin film anodes are limited. Herein, we present a new type of Ti-doped ZnS thin film fabricated by radio frequency (RF) magnetron co-sputtering. The Ti doping is designed to enhance the overall electrical conductivity of the ZnS thin film, since the insulation of ZnS is one of the major barriers to deliver its lithium storage performance. As an anode applied in lithium ion battery, the Ti-doped ZnS thin film exhibits good cycling stability up to 500 cycles at a current density of 1.0 A·g, and remains a higher specific capacity of 463.1 mAh·gthan that of the pure ZnS thin film, showing its better electrochemical reaction reversibility. The rate capability and EIS measurements manifest the more favorable electrochemical reaction kinetics of the Ti-doped ZnS thin film, moreover, the CV tests at various scan rates indicate the improved Lidiffusion kinetics in the electrode after Ti doping.
薄膜微电池对于为各种微型设备或微系统提供长期稳定的片上电源来说是迫切需要的。阳极是薄膜锂离子微电池的核心组件，然而，以往的研究大多集中在金属氧化物或硅基薄膜阳极上，关于金属硫化物薄膜阳极的报道有限。在此，我们展示了一种通过射频（RF）磁控共溅射制备的新型钛掺杂硫化锌薄膜。由于硫化锌的绝缘性是其发挥储锂性能的主要障碍之一，因此设计钛掺杂以提高硫化锌薄膜的整体电导率。作为应用于锂离子电池的阳极，钛掺杂硫化锌薄膜在1.0 A·g的电流密度下循环500次时表现出良好的循环稳定性，并且比纯硫化锌薄膜保持更高的比容量463.1 mAh·g，显示出其更好的电化学反应可逆性。倍率性能和电化学阻抗谱测量表明钛掺杂硫化锌薄膜具有更有利的电化学反应动力学，此外，在不同扫描速率下的循环伏安测试表明钛掺杂后电极中锂扩散动力学得到改善。
