Zhang Xin, Lu Lijun, Wang Wenduo, Zhao Ning, He Peng, Liu Jingquan, Yang Bin
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
ACS Appl Mater Interfaces. 2022 Aug 24;14(33):38409-38420. doi: 10.1021/acsami.2c12240. Epub 2022 Aug 11.
High-performance wearable sensors are required for applications in medical health and human-machine interaction, but their application has limited owing to the trade-off between sensitivity, pressure range, and durability. Herein, we propose the combined spraying and self-diffusion process of carbon nanotubes (CNTs) to balance and improve these parameters with the CNTs spontaneously diffusing into the film surface before the film curing. The obtained sensor not only achieves high sensitivity (155.54 kPa) and ultrawide pressure detection range (0.1-500 kPa) but also exhibits exceptional durability (over 12,000 pressure cycles at a high pressure of 300 kPa). In addition, the sensor exhibits a fast response (25 ms), good stability, and full flexibility. This process is a general approach that may improve the performance of various types of thin film piezoresistive sensors. Besides, the fabricated sensors can be flexibly scaled into sensor arrays and communicate with smart devices to achieve wireless smart monitoring. At present, the sensor shows broad application prospects in the fields of intelligent medical health and motion sensing.
医疗健康和人机交互应用需要高性能可穿戴传感器，但由于灵敏度、压力范围和耐用性之间的权衡，其应用受到限制。在此，我们提出了碳纳米管（CNT）的组合喷涂和自扩散工艺，通过在薄膜固化前使CNT自发扩散到薄膜表面来平衡和改善这些参数。所获得的传感器不仅实现了高灵敏度（155.54 kPa）和超宽压力检测范围（0.1 - 500 kPa），还表现出卓越的耐用性（在300 kPa高压下超过12,000次压力循环）。此外，该传感器具有快速响应（25 ms）、良好的稳定性和完全的柔韧性。此工艺是一种通用方法，可提高各类薄膜压阻式传感器的性能。此外，制造的传感器可灵活扩展为传感器阵列，并与智能设备通信以实现无线智能监测。目前，该传感器在智能医疗健康和运动传感领域显示出广阔的应用前景。
