Zhou Yi, Gan Fengyuan, Wang Ruxue, Lan Dun, Shang Xiangshuo, Li Wei
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
University of Chinese Academy of Sciences, Beijing 100049, China.
Sensors (Basel). 2022 Aug 18;22(16):6175. doi: 10.3390/s22166175.
Metalenses provide a powerful paradigm for mid-infrared (MIR) imaging and detection while keeping the optical system compact. However, the design of MIR metalenses simultaneously correcting chromatic aberration and off-axis monochromatic aberration remains challenging. Here, we propose an MIR doublet metalens composed of a silicon aperture metalens and a silicon focusing metalens separated by a fused silica substrate. By performing ray-tracing optimization and particle-swarm optimization, we optimized the required phase profiles as well as the sizes and spatial distributions of silicon nanopillars of the doublet metalens. Simulation results showed that the MIR doublet metalens simultaneously achieved chromatic and off-axis monochromatic aberration reduction, realizing a continuous 400 nm bandwidth and 20° field-of-view (FOV). Thanks to its planar configuration, this metalens is suitable for integration with CMOS image sensor to achieve MIR imaging and detection, which has potential application in troubleshooting and intelligent inspection of power grids. This work may facilitate the practical application of metalens-integrated micro/nanosensors in intelligent energy.
金属透镜为中红外（MIR）成像和检测提供了一种强大的范例，同时能保持光学系统紧凑。然而，设计能同时校正色差和离轴单色像差的中红外金属透镜仍然具有挑战性。在此，我们提出一种由硅孔径金属透镜和硅聚焦金属透镜组成的中红外双合金属透镜，二者由熔融石英衬底隔开。通过进行光线追迹优化和粒子群优化，我们优化了双合金属透镜所需的相位分布以及硅纳米柱的尺寸和空间分布。仿真结果表明，该中红外双合金属透镜同时实现了色差和离轴单色像差的减小，实现了连续400 nm带宽和20°视场（FOV）。由于其平面结构，这种金属透镜适合与CMOS图像传感器集成以实现中红外成像和检测，在电网故障排查和智能巡检方面具有潜在应用。这项工作可能会促进金属透镜集成微/纳传感器在智能能源领域的实际应用。
