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基于压阻薄膜的用于 3D 力检测的柔性触觉传感器。

A flexible tactile sensor based on piezoresistive thin film for 3D force detection.

机构信息

Institute of Systems Engineering, China Academy of Engineering Physics, Mianyang 621000, China.

出版信息

Rev Sci Instrum. 2022 Aug 1;93(8):085006. doi: 10.1063/5.0083428.

Abstract

This paper presents a flexible tactile sensor with a compact structure based on a piezoresistive thin film and an elastomer for detecting three-dimensional (3D) force. The film contains four independent sensing cells, which were made using a type of piezoresistive ink and a specific pectinate conductive circuit pattern based on the flexible substrate to decrease the coupling effect. The elastomer with a spherical surface is bonded to the surface of the film and transfers the force to the sensing array. A model of 3D force detection based on the proposed sensor was established, and a prototype was designed and developed. Static and dynamic experiments were carried out, and the results show that the range of the prototype is 0-50 N in the z-axis and 0-6 N in the x-axis and y-axis, which with good static and dynamic performance, especially a low coupling effect, validates the mechanism of the proposed sensor and indicates that it has good potential application in robotic grasping.

摘要

本文提出了一种基于压阻薄膜和弹性体的紧凑结构的柔性触觉传感器,用于检测三维(3D)力。该薄膜包含四个独立的传感单元,这些单元使用一种压阻油墨和一种基于柔性基底的特定梳状导电电路图案制成,以减小耦合效应。具有球形表面的弹性体与薄膜表面结合,并将力传递到传感阵列。建立了基于所提出传感器的 3D 力检测模型,并设计和开发了原型。进行了静态和动态实验,结果表明,原型在 z 轴方向的范围为 0-50N,在 x 轴和 y 轴方向的范围为 0-6N,具有良好的静态和动态性能,特别是低耦合效应,验证了所提出传感器的机制,并表明它在机器人抓取中有很好的潜在应用。

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