Chen Qiao, Liu Dong, Huang Xian-He, Yao Yao, Mao Kun-Lei
School of Automation Engineering, University of Electronic Science and Technology of China, No. 2006, Xiyuan Avenue, Chengdu 611731, China.
Nanomaterials (Basel). 2022 Sep 1;12(17):3035. doi: 10.3390/nano12173035.
This paper fabricated a high-performance chitin nanofibers (ChNFs)-integrated bulk acoustic wave (BAW) humidity sensor with an asymmetric electrode configuration. The ChNFs were successfully prepared from crab shells and used as moisture-sensitive materials to compare the performance of quartz crystal microbalance (QCM) humidity sensors with symmetric and asymmetric electrode structures. The QCM humidity sensor with a smaller electrode area exhibited high sensitivity of 58.84 Hz/%RH, competitive response/recovery time of 30/3.5 s, and low humidity hysteresis of 2.5% RH. However, it is necessary to choose a suitable electrode diameter to balance the stability and sensitivity because the impedance analysis result showed that the reduction of the electrode diameter leads to a sharp decrease in the Q value (stability). Next, the possible humidity-sensitive mechanism of the ChNFs-integrated asymmetric n-m electrode QCM humidity sensor was discussed in detail. Finally, the reasons for the highest sensitivity of the asymmetric n-m electrode QCM humidity sensors having a smaller electrode diameter were analyzed in detail in terms of both mass sensitivity and fringing field effect. This work not only demonstrates that the chitin nanofiber is an excellent potential material for moisture detection, but also provides a new perspective for designing high-performance QCM humidity sensors.
本文制备了一种具有不对称电极结构的集成高性能几丁质纳米纤维(ChNFs)的体声波(BAW)湿度传感器。几丁质纳米纤维由蟹壳成功制备,并用作湿敏材料,以比较具有对称和不对称电极结构的石英晶体微天平(QCM)湿度传感器的性能。电极面积较小的QCM湿度传感器表现出58.84 Hz/%RH的高灵敏度、30/3.5 s的有竞争力的响应/恢复时间以及2.5%RH的低湿度滞后。然而,由于阻抗分析结果表明电极直径的减小会导致Q值(稳定性)急剧下降,因此有必要选择合适的电极直径来平衡稳定性和灵敏度。接下来,详细讨论了集成ChNFs的不对称n-m电极QCM湿度传感器可能的湿敏机制。最后,从质量灵敏度和边缘场效应两方面详细分析了电极直径较小的不对称n-m电极QCM湿度传感器具有最高灵敏度的原因。这项工作不仅证明了几丁质纳米纤维是一种用于湿度检测的优秀潜在材料,而且为设计高性能QCM湿度传感器提供了新的视角。