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BiOCl 涂层石英晶体微天平的湿度传感特性

Humidity-Sensing Properties of a BiOCl-Coated Quartz Crystal Microbalance.

作者信息

Chen Qiao, Feng Ning-Bo, Huang Xian-He, Yao Yao, Jin Ying-Rong, Pan Wei, Liu Dong

机构信息

School of Automation Engineering, University of Electronic Science and Technology of China, No. 2006, Xiyuan Avenue, Chengdu, Sichuan 611731, China.

School of Materials Science and Engineering, Xihua University, No. 99 Jinzhou Road, Chengdu, Sichuan 610039, China.

出版信息

ACS Omega. 2020 Jul 21;5(30):18818-18825. doi: 10.1021/acsomega.0c01946. eCollection 2020 Aug 4.

DOI:10.1021/acsomega.0c01946
PMID:32775883
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7408249/
Abstract

The performance of a bismuth oxychloride (BiOCl)-based quartz crystal microbalance (QCM) humidity sensor was studied using an oscillating circuit method. The BiOCl powder was prepared by a hydrolysis method. Scanning electron microscopy, X-ray diffraction, and Fourier transform infrared spectroscopy were used to characterize the BiOCl sample. Its humidity-sensing property was analyzed by combining it with a QCM at room temperature (25 °C). Experimental results indicated that the BiOCl-based QCM sensor showed good humidity characteristics from 11.3 to 97.3%, such as good logarithmic frequency response to humidity levels ( = 0.994), fast response time (5.2 s)/recovery time (4.5 s), good reversibility, stability, repeatability, and low humidity hysteresis. In addition, the response to human nose breaths showed excellent practicability. Finally, the humidity sensing mechanism of the BiOCl-based QCM humidity sensor was discussed in detail. This work demonstrates that BiOCl is a promising candidate material for humidity detection.

摘要

采用振荡电路法研究了基于氯氧化铋(BiOCl)的石英晶体微天平(QCM)湿度传感器的性能。通过水解法制备了BiOCl粉末。利用扫描电子显微镜、X射线衍射和傅里叶变换红外光谱对BiOCl样品进行了表征。在室温(25℃)下将其与QCM结合,分析了其湿度传感特性。实验结果表明,基于BiOCl的QCM传感器在11.3%至97.3%的湿度范围内表现出良好的湿度特性,如对湿度水平具有良好的对数频率响应( = 0.994)、快速响应时间(5.2秒)/恢复时间(4.5秒)、良好的可逆性、稳定性、重复性和低湿度滞后。此外,对人鼻呼吸的响应显示出优异的实用性。最后,详细讨论了基于BiOCl的QCM湿度传感器的湿度传感机制。这项工作表明BiOCl是一种有前途的湿度检测候选材料。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/620e/7408249/1683af6063e1/ao0c01946_0008.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/620e/7408249/1683af6063e1/ao0c01946_0008.jpg

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