Anwar Nadia, Hussain Naveed, Ao Shen, Amjad Saira, Arshad Javaria, Anwar Tauseef, Faiza Hafiza Syeeda, Hussain Syed Sajjad, Fu Wangyang, Zhang Zhengjun
School of Materials Science and Engineering, Tsinghua University Shaw Technical Science Building, Haidian District Beijing 100084 P. R. China
Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China Chengdu 610054 Sichuan China
Nanoscale Adv. 2022 Feb 18;4(6):1608-1616. doi: 10.1039/d1na00891a. eCollection 2022 Mar 15.
Optical filters operating in the visible region of the spectrum are highly desired for applications ranging from optical communication and sensing to fluorescence microscopy and skin therapy. However, complex fabrication procedures and/or inferior performance, limit the practical applications of previously reported thin-film-based optical filters. Herein, we describe the structual design concepts and facile fabrication of vertically stacked heterolayers of TiO/AlO to obtain a bandpass filter and a longwave pass edge filter operating in the spectral range 410-600 nm and 400-597 nm, respectively. The optical filters are designed according to MacLeod simulation and fabricated magnetron sputtering, depositing alternative stacks of low (AlO) and high (TiO) refractive index materials with different thicknesses, as confirmed by spectroscopic ellipsometry. Owing to a reasonable matching between the design and the fabrication, our developed TiO/AlO heterolayer optical filters exhibited 54.60% transmission for 7-layer longwave pass edge filter and 15% reflectance for 14-layer bandpass filter of a selective set of wavelengths (400-800 nm).
光谱可见区域的光学滤波器在从光通信与传感到荧光显微镜和皮肤治疗等广泛应用中备受青睐。然而，复杂的制造工艺和/或较差的性能限制了先前报道的基于薄膜的光学滤波器的实际应用。在此，我们描述了TiO/AlO垂直堆叠异质层的结构设计概念和简便制造方法，以分别获得在410 - 600 nm和400 - 597 nm光谱范围内工作的带通滤波器和长波通边缘滤波器。这些光学滤波器根据麦克劳德模拟进行设计，并通过磁控溅射制造，沉积具有不同厚度的低（AlO）和高（TiO）折射率材料的交替堆叠层，椭圆偏振光谱法证实了这一点。由于设计与制造之间的合理匹配，我们开发的TiO/AlO异质层光学滤波器对于一组特定波长（400 - 800 nm）的7层长波通边缘滤波器表现出54.60%的透过率，对于14层带通滤波器表现出15%的反射率。
