Lin Huagang, Xing Yuxin, Chen Xiaolu, Zhang Shuo, Forsberg Erik, He Sailing
Opt Express. 2022 Jun 6;30(12):20871-20882. doi: 10.1364/OE.460645.
A novel tactile sensor for two-dimensional force location measurements, based on polymer-based planar waveguide chirped Bragg gratings (PPCBGs) fabricated on sheet PMMA substrate, is presented. The planar waveguide and chirped Bragg grating are simultaneously generated using a KrF excimer laser and a phase mask covered by a quartz chrome mask. Location and magnitude of an applied force is measured by observing the change of the wavelength of a dip in the measured spectrum and a change in the reflectivity intensity. Experimental characterization indicates submillimeter spatial resolution of applied force in the range of 1-4 N with a sensitivity of 947.02 pm/mm.
本文介绍了一种新型触觉传感器，用于二维力位置测量，该传感器基于在片状聚甲基丙烯酸甲酯（PMMA）基板上制造的聚合物基平面波导啁啾布拉格光栅（PPCBG）。平面波导和啁啾布拉格光栅是使用KrF准分子激光器和覆盖有石英铬掩膜的相位掩膜同时生成的。通过观察测量光谱中凹陷波长的变化以及反射率强度的变化来测量施加力的位置和大小。实验表征表明，在1-4 N的力范围内，施加力的空间分辨率可达亚毫米级，灵敏度为947.02 pm/mm。
