Wang Lin, Fang Debao, Jin Haibo, Li Jingbo
Opt Express. 2022 Jun 6;30(12):21295-21308. doi: 10.1364/OE.459110.
We utilize the 2D modal solution of rigorous coupled wave analysis with adaptive spatial resolution to enhance the reliability of standard RCWA for multilayer gratings with metal-dielectric structures. The conversion relation in modal solutions between the Cartesian system and the transformed system is for the first time established. Based on the proposed conversion relation, the modal solution of the metal-dielectric structure obtained in the transformed system can match the boundary conditions with modal solutions of other different grating layers in the Cartesian system. Numerical results show that even for metal patches in microwave band, the above method can still achieve good convergence and is perfectly suitable for multi-layer structure calculation.
我们利用具有自适应空间分辨率的严格耦合波分析的二维模态解，以提高标准严格耦合波分析对于具有金属 - 电介质结构的多层光栅的可靠性。首次建立了笛卡尔坐标系与变换后的坐标系之间模态解的转换关系。基于所提出的转换关系，在变换后的坐标系中获得的金属 - 电介质结构的模态解可以与笛卡尔坐标系中其他不同光栅层的模态解匹配边界条件。数值结果表明，即使对于微波波段的金属贴片，上述方法仍能实现良好的收敛，并且非常适合多层结构计算。
