采用混合制造技术加工的微流多层衍射光学元件。

Microflow multi-layer diffraction optical element processed by hybrid manufacturing technology.

作者信息

Tan Mingyue, Huang Long, Cao Jiayi, Zhang Han, Zhao Shaoqing, Liu Minzhe, Jia Zhongqing, Zhai Ruizhan, Liu Hua

出版信息

Opt Express. 2022 Jul 4;30(14):24689-24702. doi: 10.1364/OE.464192.

Abstract

Traditional planar diffractive optical elements (DOEs) are challenged in imaging systems due to diffraction efficiency and chromatic dispersion. In this paper, we have designed a microfluidic diffractive optical element (MFDOE), which is processed by digital micromirror device (DMD) maskless lithography (DMDML) assisted femtosecond laser direct writing (FsLDW). MFDOE is a combination of photoresist-based multi-layer harmonic diffraction surface and liquid, realizing diffraction efficiency of more than 90% in the visible band. And it shows achromatic characteristics in the two bands of 469 nm (±20 nm) and 625 nm (±20 nm). These results show that MFDOE has good imaging performance.

摘要

传统的平面衍射光学元件（DOEs）在成像系统中因衍射效率和色散问题而面临挑战。在本文中，我们设计了一种微流控衍射光学元件（MFDOE），它是通过数字微镜器件（DMD）无掩模光刻（DMDML）辅助飞秒激光直写（FsLDW）工艺加工而成。MFDOE是基于光刻胶的多层谐波衍射表面与液体的组合，在可见光波段实现了超过90%的衍射效率。并且它在469 nm（±20 nm）和625 nm（±20 nm）这两个波段表现出消色差特性。这些结果表明MFDOE具有良好的成像性能。